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Measurement of driving electrical signal and input impedance analysis of PZT transducer in thermosonic bonding

  • Zhili Long*
  • , Yunxin Wu
  • , Lei Han
  • , Jianping Li
  • , Hongquan Zhou
  • *Corresponding author for this work
  • Central South University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In thermosonic bonding process, the driving electrical signal and input impedance of PZT transducer reflect directly the bonding process between gold ball and substrate. This paper describes a method of getting the electrical signal of PZT transducer during the thermosonic bonding process, and analyzes the input impedance of PZT transducer based on the sampled data. From many experiment samples we find that, the driving voltage and current of PZT transducer are approximately 62KHZ sine wave; the range of the voltage is from 2V to 8V, and the current is only from 20mA to 100mA; the real bonding period is about 52ms. By PSD(Power Spectrum Density) analysis to the electrical signal, we find that there are harmonics in the signal. At last, the paper uses the concept of generalized impedance to analyze the input impedance of PZT transducer during the thermosonic bonding process.

Original languageEnglish
Title of host publicationProceedings of the Sixth IEEE CPMT Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, HDP'04
Pages322-325
Number of pages4
StatePublished - 2004
Externally publishedYes
EventProceedings of the Sixth IEEE CPMT Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, HDP'04 - Shanghai, China
Duration: 30 Jun 20043 Jul 2004

Publication series

NameProceedings of the Sixth IEEE CPMT Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, HDP'04

Conference

ConferenceProceedings of the Sixth IEEE CPMT Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, HDP'04
Country/TerritoryChina
CityShanghai
Period30/06/043/07/04

Keywords

  • Driving electrical signal of PZT transducer
  • Impedance analysis
  • Thermosonic bonding

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