Measurement and control of ambient temperature for metrological atomic force microscope

Jian Jun Cui; Si Tian Gao; Hong Wei Shao; Hua Du; Ming Zhen Lu; Yu Shu Shi; Hong Bo Li; Lei Pi

doi:10.3969/j.issn.1000-1158.2009.z1.032

Measurement and control of ambient temperature for metrological atomic force microscope

Jian Jun Cui^*
, Si Tian Gao
, Hong Wei Shao
, Hua Du
, Ming Zhen Lu
, Yu Shu Shi
, Hong Bo Li
, Lei Pi

^*Corresponding author for this work

National Institute of Metrology China
Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

Temperature measurement error is the major factor to influence the precision for the nano-scale measurement in the areas of nano-structure characterization and testing. According to the materials thermophysical properties and the relationship of the air refractivity and optical measurement, metrological atomic force microscope (AFM) and the large range nano-measuring machine (NMM) are comprehensive studied. Firstly, high precision multipoint temperature measurement system is designed which can measure the temperature of AFM and NMM. The effect of ambient temperature variation is analyzed and evaluated in the course of scanning measurement. Secondly, the related technical problems of the temperature measurement in nano-scale measurement are studied to ensure the nano-structure characterization and measurement are accurate and reliable.

Original language	English
Pages (from-to)	123-127
Number of pages	5
Journal	Jiliang Xuebao/Acta Metrologica Sinica
Volume	30
Issue number	SUPPL. 1
DOIs	https://doi.org/10.3969/j.issn.1000-1158.2009.z1.032
State	Published - Oct 2009
Externally published	Yes

Keywords

Atomic force microscopy
Metrology
Nano-measuring machine
Temperature measure
Uncertainty of measurement

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10.3969/j.issn.1000-1158.2009.z1.032

Cite this

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title = "Measurement and control of ambient temperature for metrological atomic force microscope",

abstract = "Temperature measurement error is the major factor to influence the precision for the nano-scale measurement in the areas of nano-structure characterization and testing. According to the materials thermophysical properties and the relationship of the air refractivity and optical measurement, metrological atomic force microscope (AFM) and the large range nano-measuring machine (NMM) are comprehensive studied. Firstly, high precision multipoint temperature measurement system is designed which can measure the temperature of AFM and NMM. The effect of ambient temperature variation is analyzed and evaluated in the course of scanning measurement. Secondly, the related technical problems of the temperature measurement in nano-scale measurement are studied to ensure the nano-structure characterization and measurement are accurate and reliable.",

keywords = "Atomic force microscopy, Metrology, Nano-measuring machine, Temperature measure, Uncertainty of measurement",

author = "Cui, \{Jian Jun\} and Gao, \{Si Tian\} and Shao, \{Hong Wei\} and Hua Du and Lu, \{Ming Zhen\} and Shi, \{Yu Shu\} and Li, \{Hong Bo\} and Lei Pi",

year = "2009",

month = oct,

doi = "10.3969/j.issn.1000-1158.2009.z1.032",

language = "英语",

volume = "30",

pages = "123--127",

journal = "Jiliang Xuebao/Acta Metrologica Sinica",

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publisher = "Chinese Society for Measurement",

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}

TY - JOUR

T1 - Measurement and control of ambient temperature for metrological atomic force microscope

AU - Cui, Jian Jun

AU - Gao, Si Tian

AU - Shao, Hong Wei

AU - Du, Hua

AU - Lu, Ming Zhen

AU - Shi, Yu Shu

AU - Li, Hong Bo

AU - Pi, Lei

PY - 2009/10

Y1 - 2009/10

N2 - Temperature measurement error is the major factor to influence the precision for the nano-scale measurement in the areas of nano-structure characterization and testing. According to the materials thermophysical properties and the relationship of the air refractivity and optical measurement, metrological atomic force microscope (AFM) and the large range nano-measuring machine (NMM) are comprehensive studied. Firstly, high precision multipoint temperature measurement system is designed which can measure the temperature of AFM and NMM. The effect of ambient temperature variation is analyzed and evaluated in the course of scanning measurement. Secondly, the related technical problems of the temperature measurement in nano-scale measurement are studied to ensure the nano-structure characterization and measurement are accurate and reliable.

AB - Temperature measurement error is the major factor to influence the precision for the nano-scale measurement in the areas of nano-structure characterization and testing. According to the materials thermophysical properties and the relationship of the air refractivity and optical measurement, metrological atomic force microscope (AFM) and the large range nano-measuring machine (NMM) are comprehensive studied. Firstly, high precision multipoint temperature measurement system is designed which can measure the temperature of AFM and NMM. The effect of ambient temperature variation is analyzed and evaluated in the course of scanning measurement. Secondly, the related technical problems of the temperature measurement in nano-scale measurement are studied to ensure the nano-structure characterization and measurement are accurate and reliable.

KW - Atomic force microscopy

KW - Metrology

KW - Nano-measuring machine

KW - Temperature measure

KW - Uncertainty of measurement

UR - https://www.scopus.com/pages/publications/77949403953

U2 - 10.3969/j.issn.1000-1158.2009.z1.032

DO - 10.3969/j.issn.1000-1158.2009.z1.032

M3 - 文章

AN - SCOPUS:77949403953

SN - 1000-1158

VL - 30

SP - 123

EP - 127

JO - Jiliang Xuebao/Acta Metrologica Sinica

JF - Jiliang Xuebao/Acta Metrologica Sinica

IS - SUPPL. 1

ER -

Measurement and control of ambient temperature for metrological atomic force microscope

Abstract

Keywords

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