Magnetron sputtered hard and yet tough nanocomposite coatings with case studies: Nanocrystalline TiN embedded in amorphous SiNx

Sam Zhang; Deen Sun; Xuan Lam Bui

doi:10.1142/9781860949975_0001

Magnetron sputtered hard and yet tough nanocomposite coatings with case studies: Nanocrystalline TiN embedded in amorphous SiN_x

Sam Zhang
, Deen Sun
, Xuan Lam Bui

Nanyang Technological University

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

11 Scopus citations

Original language	English
Title of host publication	Nanocomposite Thin Films and Coatings
Subtitle of host publication	Processing, Properties and Performance
Publisher	Imperial College Press
Pages	1-110
Number of pages	110
ISBN (Electronic)	9781860949975
ISBN (Print)	1860947840, 9781860947841
DOIs	https://doi.org/10.1142/9781860949975_0001
State	Published - 1 Jan 2007
Externally published	Yes

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10.1142/9781860949975_0001

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title = "Magnetron sputtered hard and yet tough nanocomposite coatings with case studies: Nanocrystalline TiN embedded in amorphous SiNx",

author = "Sam Zhang and Deen Sun and Bui, \{Xuan Lam\}",

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Magnetron sputtered hard and yet tough nanocomposite coatings with case studies: Nanocrystalline TiN embedded in amorphous SiN_x. / Zhang, Sam; Sun, Deen; Bui, Xuan Lam.
Nanocomposite Thin Films and Coatings: Processing, Properties and Performance. Imperial College Press, 2007. p. 1-110.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

TY - CHAP

T1 - Magnetron sputtered hard and yet tough nanocomposite coatings with case studies

T2 - Nanocrystalline TiN embedded in amorphous SiNx

AU - Zhang, Sam

AU - Sun, Deen

AU - Bui, Xuan Lam

PY - 2007/1/1

Y1 - 2007/1/1

UR - https://www.scopus.com/pages/publications/84967361509

U2 - 10.1142/9781860949975_0001

DO - 10.1142/9781860949975_0001

M3 - 章节

AN - SCOPUS:84967361509

SN - 1860947840

SN - 9781860947841

SP - 1

EP - 110

BT - Nanocomposite Thin Films and Coatings

PB - Imperial College Press

ER -

Magnetron sputtered hard and yet tough nanocomposite coatings with case studies: Nanocrystalline TiN embedded in amorphous SiNx

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Magnetron sputtered hard and yet tough nanocomposite coatings with case studies: Nanocrystalline TiN embedded in amorphous SiN_x