Macro/micro manipulator based on PZT actuator

Macro/micro manipulators overcome the limitations of conventional positioning system, and satisfy the requirements of large travel range, high speed and high accuracy at the same time. As a novel actuator, PZT is effective in the field of Macro/micro positioning for its compact size, higher resolution of displacement, non-friction and non-backlash. Current overseas situations and the research of the Robot Research Institute of HIT on Macro/micro manipulators based on PZT are discussed too. Macro/micro manipulators are applied in many fields such as precision assembly, fiber alignment system, IC bonding, biologic engineering, flexible manipulator and so on.