Abstract
The flow field in the growth of diamond-like carbon (DLC), gas barrier films by RF plasma enhanced chemical vapor deposition (RFPECVD) on the inner walls of polythylene terephthalate (PET) bottles, was simulated with lattice Boltzmann model (LBM). The impacts of the flow field characteristics, including pressure distribution, velocity distribution of various gases, coefficients of kinetic viscosity, configuration of the gas inlet nozzle and gas flow rate, on the uniformity of DLC films were studied. The results show that the flow field characteristics significantly affect the uniform deposition of the DLC films. For instance, the back-flow can be reduced to obtain a laminar flow by decreasing the gas flow rate and increasing the coefficient of kinetic viscosity. And the geometry optimization of the gas nozzle strongly affects the flow field, and the uniformity of DLC film deposition.
| Original language | English |
|---|---|
| Pages (from-to) | 391-397 |
| Number of pages | 7 |
| Journal | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology |
| Volume | 29 |
| Issue number | 4 |
| DOIs | |
| State | Published - Aug 2009 |
| Externally published | Yes |
Keywords
- Diamond-like carbon film (DLC)
- Flow field
- Inner surface
- Lattice Boltzmann
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