Laser-induced self-propagating reaction in Ti/a-Si multilayer films

Mei Zhu; Rong An; Chunqing Wang; Xingyao Fu

doi:10.1109/ICEPT.2013.6756679

Laser-induced self-propagating reaction in Ti/a-Si multilayer films

Mei Zhu
, Rong An
, Chunqing Wang
, Xingyao Fu

Faculty of Life Sciences and Medicine

Harbin Institute of Technology

Research output: Contribution to conference › Paper › peer-review

1 Scopus citations

Abstract

In this paper, we choose Ti/a-Si multilayer films as our Nano-scale reaction systems for its high mount of exothermic energy and low induction energy. The films are fabricated by magnetron sputtering layer by layer. AFM and TEM are used to characterize surface roughness and cross section structure of the material systems. Then, we succeed in using laser with different amount of energy to induce self-propagating reaction in Ti/a-Si multilayer films. At the same time, we take advantage of high speed cameras to investigate and record the process of the reaction and its velocity. Finally, we use SEM and XRD methods to analyze the reaction product. Result shows that very thin Ti/a-Si films can be induced by laser with low energy. If the stability and handling properties can be improved, Ti/a-Si multilayer film is a strong candidate in the field of nanoscale application.

Original language	English
Pages	1227-1230
Number of pages	4
DOIs	https://doi.org/10.1109/ICEPT.2013.6756679
State	Published - 2013
Event	2013 14th International Conference on Electronic Packaging Technology, ICEPT 2013 - Dalian, China Duration: 11 Aug 2013 → 14 Aug 2013

Conference

Conference	2013 14th International Conference on Electronic Packaging Technology, ICEPT 2013
Country/Territory	China
City	Dalian
Period	11/08/13 → 14/08/13

Keywords

Ti/a-Si multilayer films
laser
self-propagating reaction

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10.1109/ICEPT.2013.6756679

Cite this

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title = "Laser-induced self-propagating reaction in Ti/a-Si multilayer films",

abstract = "In this paper, we choose Ti/a-Si multilayer films as our Nano-scale reaction systems for its high mount of exothermic energy and low induction energy. The films are fabricated by magnetron sputtering layer by layer. AFM and TEM are used to characterize surface roughness and cross section structure of the material systems. Then, we succeed in using laser with different amount of energy to induce self-propagating reaction in Ti/a-Si multilayer films. At the same time, we take advantage of high speed cameras to investigate and record the process of the reaction and its velocity. Finally, we use SEM and XRD methods to analyze the reaction product. Result shows that very thin Ti/a-Si films can be induced by laser with low energy. If the stability and handling properties can be improved, Ti/a-Si multilayer film is a strong candidate in the field of nanoscale application.",

keywords = "Ti/a-Si multilayer films, laser, self-propagating reaction",

author = "Mei Zhu and Rong An and Chunqing Wang and Xingyao Fu",

year = "2013",

doi = "10.1109/ICEPT.2013.6756679",

language = "英语",

pages = "1227--1230",

note = "2013 14th International Conference on Electronic Packaging Technology, ICEPT 2013 ; Conference date: 11-08-2013 Through 14-08-2013",

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TY - CONF

T1 - Laser-induced self-propagating reaction in Ti/a-Si multilayer films

AU - Zhu, Mei

AU - An, Rong

AU - Wang, Chunqing

AU - Fu, Xingyao

PY - 2013

Y1 - 2013

N2 - In this paper, we choose Ti/a-Si multilayer films as our Nano-scale reaction systems for its high mount of exothermic energy and low induction energy. The films are fabricated by magnetron sputtering layer by layer. AFM and TEM are used to characterize surface roughness and cross section structure of the material systems. Then, we succeed in using laser with different amount of energy to induce self-propagating reaction in Ti/a-Si multilayer films. At the same time, we take advantage of high speed cameras to investigate and record the process of the reaction and its velocity. Finally, we use SEM and XRD methods to analyze the reaction product. Result shows that very thin Ti/a-Si films can be induced by laser with low energy. If the stability and handling properties can be improved, Ti/a-Si multilayer film is a strong candidate in the field of nanoscale application.

AB - In this paper, we choose Ti/a-Si multilayer films as our Nano-scale reaction systems for its high mount of exothermic energy and low induction energy. The films are fabricated by magnetron sputtering layer by layer. AFM and TEM are used to characterize surface roughness and cross section structure of the material systems. Then, we succeed in using laser with different amount of energy to induce self-propagating reaction in Ti/a-Si multilayer films. At the same time, we take advantage of high speed cameras to investigate and record the process of the reaction and its velocity. Finally, we use SEM and XRD methods to analyze the reaction product. Result shows that very thin Ti/a-Si films can be induced by laser with low energy. If the stability and handling properties can be improved, Ti/a-Si multilayer film is a strong candidate in the field of nanoscale application.

KW - Ti/a-Si multilayer films

KW - laser

KW - self-propagating reaction

UR - https://www.scopus.com/pages/publications/84898042938

U2 - 10.1109/ICEPT.2013.6756679

DO - 10.1109/ICEPT.2013.6756679

M3 - 论文

AN - SCOPUS:84898042938

SP - 1227

EP - 1230

T2 - 2013 14th International Conference on Electronic Packaging Technology, ICEPT 2013

Y2 - 11 August 2013 through 14 August 2013

ER -

Laser-induced self-propagating reaction in Ti/a-Si multilayer films

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Keywords

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