Large-Scale Precision Micro-Vibration Stiffness Regulation Method Based on Spatial Magnetic Ring Array

To solve the mutual constraint between the large load capacity and low stiffness of large-scale air-floating micro-vibration isolation (LAMI), a spatial magnetic ring array stiffness regulation method (SMRASRM) is proposed, in which multi-layer magnetic rings are axially arranged, and the adjacent layers are magnetized perpendicularly to each other to form a spatial magnetic ring array with high magnetic density, thus realizing low stiffness under large load capacity. The analytical magnetic force and stiffness model of SMRASRM is established to analyze its effect on the dynamics of LAMI, and the design constraints, characteristics, and laws for reducing the stiffness of LAMI and achieving low-frequency isolation under large load capacity are also investigated. An experimental setup is built, and experimental results show that the stiffness of LAMI decreases by 28.40%, and the peak transmissibility decreases from 15.61 dB to 3.94 dB, which combines low stiffness and low transmissibility under large load capacity.