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Kinetic study of a novel trans-scale precision positioning stage based on stick-slip effect

  • Bowen Zhong*
  • , Zhenhua Wang
  • , Liguo Chen
  • , Lining Sun
  • *Corresponding author for this work
  • Harbin Institute of Technology
  • Soochow University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, the stick-slip effect was introduced and a prototype of trans-scale precision positioning stage based on the stick-slip effect was designed. The electro-mechanical conversion model of PZT actuator was built by the capacitance charge-discharge formula and the step model of PZT actuator. According to the structure of the prototype, the second-order oscillation model of inertial mass was also deduced and simulate in Matlab-Simulink software. Base on kinetic experiment, the simulation results of second-order oscillation model of inertial mass was validated by the experiment results. The oscillation model of inertial mass well reflects the oscillation phenomenon in each step of stick-slip driving and improves the accuracy of the input displacement signal in the modeling of stick-slip driving compared with only using the step model of PZT actuator.

Original languageEnglish
Title of host publicationProceedings of 2011 International Conference on Electronic and Mechanical Engineering and Information Technology, EMEIT 2011
Pages373-376
Number of pages4
DOIs
StatePublished - 2011
Event2011 International Conference on Electronic and Mechanical Engineering and Information Technology, EMEIT 2011 - Harbin, China
Duration: 12 Aug 201114 Aug 2011

Publication series

NameProceedings of 2011 International Conference on Electronic and Mechanical Engineering and Information Technology, EMEIT 2011
Volume1

Conference

Conference2011 International Conference on Electronic and Mechanical Engineering and Information Technology, EMEIT 2011
Country/TerritoryChina
CityHarbin
Period12/08/1114/08/11

Keywords

  • Kinetic
  • Stick-slip
  • Trans-scale

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