@inproceedings{3d6fc2b4fac9483389035667bdd2fbde,
title = "Kinematics research for a high-precise multi-gratings mosaic mechanism",
abstract = "A novel design of high load capacity multiaxis positioning stages with accuracy in the range of nanometers is presented. For strokes of 2mm with no play and high stiffness a general design principle supporting five Cartesian degrees of freedom has been developed using a new parallel kinematic topology based on Parallelogram arrangements. The five uniform feed drives are improved dual mode mechanism with servomotor and ballscrew as macro-actuator and piezoelectric transducer (PZT) with resolution of 1.2nm as micro-actuator. The performance of the setup and its kinematic properties are described as well as resolution of the five motions and their crosstalk. The setup has been implemented with outstanding characteristics and excellent reliability for alignment of a multigrating mosaic compressor in a PW-class CPA-laser.",
keywords = "Kinematics, Multi-gratings mosaic, Parallel mechanism",
author = "Lihua Lu and Yingchun Liang and Fuli Yu and Baoku Su",
year = "2012",
doi = "10.4028/www.scientific.net/AMR.452-453.1496",
language = "英语",
isbn = "9783037853511",
series = "Advanced Materials Research",
pages = "1496--1500",
booktitle = "Management, Manufacturing and Materials Engineering",
note = "2011 International Conference on Management, Manufacturing and Materials Engineering, ICMMM 2011 ; Conference date: 08-12-2011 Through 10-12-2011",
}