@inproceedings{78cff8abecaa422bb52a4f78a2e374d1,
title = "Key technologies of machine tool for micro electro discharge machining",
abstract = "This paper presents the key technologies of a precision machine tool dedicated for micro electro discharge machining (μ-EDM). The proposed μ-EDM machine tool consists of a high precision granite body, a high precision X-Y-Z stage, a high speed rotary spindle, a micro energy pulse power supply and a microscopic computer vision system. A special CAM software package is developed to generate the electrode tool path and compensate the electrode wear for machining 3D micro structures. Machining experiments show that micro electrode of {\O}4 μm, micro hole of {\O}10 μm and complex microstructures have been manufactured stably on this machine.",
keywords = "3 dimensional micro structure, Computer vision, Micro electro machining, Micro machining",
author = "Gang Li and Wansheng Zhao and Rui Guo and Yong Zhang and Zhiyong Li and Fuqiang Hu",
year = "2007",
language = "英语",
series = "Proceedings of the 15th International Symposium on Electromachining, ISEM 2007",
publisher = "Industrial and Management Systems Engineering",
pages = "253--256",
editor = "Sundaram, \{Murali Meenakshi\} and K.P. Rajurkar and Resnick, \{Ralph L.\}",
booktitle = "Proceedings of the 15th International Symposium on Electromachining, ISEM 2007",
note = "15th International Symposium on Electromachining, ISEM 2007 ; Conference date: 23-04-2007 Through 27-04-2007",
}