TY - GEN
T1 - Iterative Control Decoupling Tuning by Feedforward Compensation for Precision Motion Stage
AU - Zhao, Hongyang
AU - Li, Li
AU - Liu, Yang
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - In multi-input multi-output (MIMO) ultra-precision motion control system, high-performance decoupling method is the key to reduce the interactions between different degree of freedoms (DOFs). However, the manufacturing and assembling errors will greatly affect the decoupling performance. Some non-negligible factors, such as the center of gravity (CoG) and actuator positions, cannot be accurately determined, which will deteriorate the control accuracy. To tackle this problem, an iterative control decoupling tuning method by feedforward compensation is proposed in this paper. The proposed strategy using feedback signal to tune the parameters of feedforward compensator iteratively and further compensate for the closed-loop dynamics. The simulation results show that the proposed method is more effective, including the convergence accuracy, convergence speed and the improvement of the tracking error caused by the coupling.
AB - In multi-input multi-output (MIMO) ultra-precision motion control system, high-performance decoupling method is the key to reduce the interactions between different degree of freedoms (DOFs). However, the manufacturing and assembling errors will greatly affect the decoupling performance. Some non-negligible factors, such as the center of gravity (CoG) and actuator positions, cannot be accurately determined, which will deteriorate the control accuracy. To tackle this problem, an iterative control decoupling tuning method by feedforward compensation is proposed in this paper. The proposed strategy using feedback signal to tune the parameters of feedforward compensator iteratively and further compensate for the closed-loop dynamics. The simulation results show that the proposed method is more effective, including the convergence accuracy, convergence speed and the improvement of the tracking error caused by the coupling.
KW - Multiple-input multiple-output (MIMO) control system
KW - control decoupling
KW - crosstalk
KW - iterative feedforward tuning
KW - precision motion stage
UR - https://www.scopus.com/pages/publications/85165956812
U2 - 10.1109/DDCLS58216.2023.10167151
DO - 10.1109/DDCLS58216.2023.10167151
M3 - 会议稿件
AN - SCOPUS:85165956812
T3 - Proceedings of 2023 IEEE 12th Data Driven Control and Learning Systems Conference, DDCLS 2023
SP - 1812
EP - 1817
BT - Proceedings of 2023 IEEE 12th Data Driven Control and Learning Systems Conference, DDCLS 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th IEEE Data Driven Control and Learning Systems Conference, DDCLS 2023
Y2 - 12 May 2023 through 14 May 2023
ER -