Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation

Z. M. Zeng; X. B. Tian; P. K. Chu

doi:10.1116/1.1531136

Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation

Z. M. Zeng
, X. B. Tian
, P. K. Chu^*

^*Corresponding author for this work

City University of Hong Kong

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Metal plasma immersion ion implantation and deposition (MePIII-D) is a deposition technique combining metal film deposition using a vacuum arc plasma source with the immersion characteristics of PIII. Thus, TiN or TiC films deposited on steels by PIII and MePIII-d to improve surface properties such as wear, friction, and corrosion are reported. This paper combines gaseous C₂H₂ PIII with titanium MePIII-D using a vacuum arc plasma source in an effort to obtain a hard coating exhibiting more superior properties. The results show that a film with a multiple-layered structure formed on the 9Cr18 steel exhibits significantly improved wear resistance and frictional properties.

Original language	English
Pages (from-to)	175-179
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	1
DOIs	https://doi.org/10.1116/1.1531136
State	Published - Jan 2003
Externally published	Yes

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title = "Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation",

abstract = "Metal plasma immersion ion implantation and deposition (MePIII-D) is a deposition technique combining metal film deposition using a vacuum arc plasma source with the immersion characteristics of PIII. Thus, TiN or TiC films deposited on steels by PIII and MePIII-d to improve surface properties such as wear, friction, and corrosion are reported. This paper combines gaseous C2H2 PIII with titanium MePIII-D using a vacuum arc plasma source in an effort to obtain a hard coating exhibiting more superior properties. The results show that a film with a multiple-layered structure formed on the 9Cr18 steel exhibits significantly improved wear resistance and frictional properties.",

author = "Zeng, \{Z. M.\} and Tian, \{X. B.\} and Chu, \{P. K.\}",

year = "2003",

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doi = "10.1116/1.1531136",

language = "英语",

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T1 - Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation

AU - Zeng, Z. M.

AU - Tian, X. B.

AU - Chu, P. K.

PY - 2003/1

Y1 - 2003/1

N2 - Metal plasma immersion ion implantation and deposition (MePIII-D) is a deposition technique combining metal film deposition using a vacuum arc plasma source with the immersion characteristics of PIII. Thus, TiN or TiC films deposited on steels by PIII and MePIII-d to improve surface properties such as wear, friction, and corrosion are reported. This paper combines gaseous C2H2 PIII with titanium MePIII-D using a vacuum arc plasma source in an effort to obtain a hard coating exhibiting more superior properties. The results show that a film with a multiple-layered structure formed on the 9Cr18 steel exhibits significantly improved wear resistance and frictional properties.

AB - Metal plasma immersion ion implantation and deposition (MePIII-D) is a deposition technique combining metal film deposition using a vacuum arc plasma source with the immersion characteristics of PIII. Thus, TiN or TiC films deposited on steels by PIII and MePIII-d to improve surface properties such as wear, friction, and corrosion are reported. This paper combines gaseous C2H2 PIII with titanium MePIII-D using a vacuum arc plasma source in an effort to obtain a hard coating exhibiting more superior properties. The results show that a film with a multiple-layered structure formed on the 9Cr18 steel exhibits significantly improved wear resistance and frictional properties.

UR - https://www.scopus.com/pages/publications/0037276577

U2 - 10.1116/1.1531136

DO - 10.1116/1.1531136

M3 - 文章

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SN - 0734-2101

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 1

ER -

Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation

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