Investigation on thickness of ultra-thin carbon protective coatings on slider surface

Hua Yu Zhang; Xiao Qiang ,Xie; Yuan Shi; Shan Dan Li; Yi Wei Liu

Investigation on thickness of ultra-thin carbon protective coatings on slider surface

Hua Yu Zhang^*
, Xiao Qiang ,Xie
, Yuan Shi
, Shan Dan Li
, Yi Wei Liu

^*Corresponding author for this work

School of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Methods of measuring the thickness of ultra-thin DLC film and Si interlayer were investigated by AES, XPS, TEM in present paper. The results of XPS and AES are consistent with each other, but a discrepancy existed between them and TEM. Clearing interface of DLC and Si layers can't be observed in HRTEM image. Furthermore, what led the different measured thickness among above three methods were investigated.

Original language	English
Pages (from-to)	28-30
Number of pages	3
Journal	Journal of Materials Engineering
Issue number	SUPPL.
State	Published - Jul 2006

Keywords

AES
TEM
Thickness
Ultra-thin DLC
XPS

Cite this

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title = "Investigation on thickness of ultra-thin carbon protective coatings on slider surface",

abstract = "Methods of measuring the thickness of ultra-thin DLC film and Si interlayer were investigated by AES, XPS, TEM in present paper. The results of XPS and AES are consistent with each other, but a discrepancy existed between them and TEM. Clearing interface of DLC and Si layers can't be observed in HRTEM image. Furthermore, what led the different measured thickness among above three methods were investigated.",

keywords = "AES, TEM, Thickness, Ultra-thin DLC, XPS",

author = "Zhang, \{Hua Yu\} and ,Xie, \{Xiao Qiang\} and Yuan Shi and Li, \{Shan Dan\} and Liu, \{Yi Wei\}",

year = "2006",

month = jul,

language = "英语",

pages = "28--30",

journal = "Journal of Materials Engineering",

issn = "1001-4381",

publisher = "Science Press ",

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T1 - Investigation on thickness of ultra-thin carbon protective coatings on slider surface

AU - Zhang, Hua Yu

AU - ,Xie, Xiao Qiang

AU - Shi, Yuan

AU - Li, Shan Dan

AU - Liu, Yi Wei

PY - 2006/7

Y1 - 2006/7

N2 - Methods of measuring the thickness of ultra-thin DLC film and Si interlayer were investigated by AES, XPS, TEM in present paper. The results of XPS and AES are consistent with each other, but a discrepancy existed between them and TEM. Clearing interface of DLC and Si layers can't be observed in HRTEM image. Furthermore, what led the different measured thickness among above three methods were investigated.

AB - Methods of measuring the thickness of ultra-thin DLC film and Si interlayer were investigated by AES, XPS, TEM in present paper. The results of XPS and AES are consistent with each other, but a discrepancy existed between them and TEM. Clearing interface of DLC and Si layers can't be observed in HRTEM image. Furthermore, what led the different measured thickness among above three methods were investigated.

KW - AES

KW - TEM

KW - Thickness

KW - Ultra-thin DLC

KW - XPS

UR - https://www.scopus.com/pages/publications/33746856831

M3 - 文章

AN - SCOPUS:33746856831

SN - 1001-4381

SP - 28

EP - 30

JO - Journal of Materials Engineering

JF - Journal of Materials Engineering

IS - SUPPL.

ER -

Investigation on thickness of ultra-thin carbon protective coatings on slider surface

Abstract

Keywords

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