Investigation on nano-machining characteristics of silicon by AFM

To achieve machining characteristics of brittle materials on the nanometer scale using an AFM diamond tip as the cutting tool, scratching tests and machining tests were carried out on the surface of monocrystal silicon based on AFM. Comparisons were performed between experimental results and the results obtained from the macro turning experiments. The conclusion that machining silicon on the nanometer scale belongs to plastic machining can be drawn. In addition, surface quality machined by the AFM diamond tip is mainly influenced by two factors: remained height of materials and adhesion of chips on the machined surface. Moreover, the fact that AFM, as a machining tool, influenced by its scratching directions, can remove materials on the nanometer scale and get chips with several nanometers in depth is verified.