Investigation of the effect of annealing temperature on optical properties of lanthanum-oxide thin films prepared by sol-gel method

Gang Gao; Lei Yang; Bing Dai; Fei Xia; Zhenhuai Yang; Shuai Guo; Peng Wang; Fangjuan Geng; Jiecai Han; Jiaqi Zhu

doi:10.1016/j.surfcoat.2018.07.001

Investigation of the effect of annealing temperature on optical properties of lanthanum-oxide thin films prepared by sol-gel method

Gang Gao
, Lei Yang
, Bing Dai
, Fei Xia
, Zhenhuai Yang
, Shuai Guo
, Peng Wang
, Fangjuan Geng
, Jiecai Han
, Jiaqi Zhu^*

^*Corresponding author for this work

Harbin Institute of Technology
Ministry of Education of the People's Republic of China

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

As lanthanum oxide (La₂O₃) has a large bandgap, it exhibits excellent optical properties. In this work, La₂O₃ thin films are prepared by the sol-gel method from a lanthanum chloride (LaCl₃) precursor, on quartz and sapphire (0001) substrates. The effect of the annealing temperature (400–800 °C) on the optical properties of the La₂O₃ films is investigated. The structure and optical properties are analyzed by X-ray diffraction, atomic force microscopy, scanning electronic microscopy, X-ray photoemission spectroscopy, Raman spectroscopy, ultraviolet (UV)–visible spectroscopy, Fourier transform infrared spectroscopy, and infrared variable angle spectroscopic ellipsometry. Results indicate that with an annealing temperature of ~600 °C, the roughness and optical properties of La₂O₃ films can be significantly improved.

Original language	English
Pages (from-to)	164-172
Number of pages	9
Journal	Surface and Coatings Technology
Volume	365
DOIs	https://doi.org/10.1016/j.surfcoat.2018.07.001
State	Published - 15 May 2019

Keywords

Annealing temperature
LaO films
Optical properties

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10.1016/j.surfcoat.2018.07.001

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@article{600845bbcde54648bdfed1099e95c618,

title = "Investigation of the effect of annealing temperature on optical properties of lanthanum-oxide thin films prepared by sol-gel method",

abstract = "As lanthanum oxide (La2O3) has a large bandgap, it exhibits excellent optical properties. In this work, La2O3 thin films are prepared by the sol-gel method from a lanthanum chloride (LaCl3) precursor, on quartz and sapphire (0001) substrates. The effect of the annealing temperature (400–800 °C) on the optical properties of the La2O3 films is investigated. The structure and optical properties are analyzed by X-ray diffraction, atomic force microscopy, scanning electronic microscopy, X-ray photoemission spectroscopy, Raman spectroscopy, ultraviolet (UV)–visible spectroscopy, Fourier transform infrared spectroscopy, and infrared variable angle spectroscopic ellipsometry. Results indicate that with an annealing temperature of \textasciitilde{}600 °C, the roughness and optical properties of La2O3 films can be significantly improved.",

keywords = "Annealing temperature, LaO films, Optical properties",

author = "Gang Gao and Lei Yang and Bing Dai and Fei Xia and Zhenhuai Yang and Shuai Guo and Peng Wang and Fangjuan Geng and Jiecai Han and Jiaqi Zhu",

note = "Publisher Copyright: {\textcopyright} 2018 Elsevier B.V.",

year = "2019",

month = may,

day = "15",

doi = "10.1016/j.surfcoat.2018.07.001",

language = "英语",

volume = "365",

pages = "164--172",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Investigation of the effect of annealing temperature on optical properties of lanthanum-oxide thin films prepared by sol-gel method

AU - Gao, Gang

AU - Yang, Lei

AU - Dai, Bing

AU - Xia, Fei

AU - Yang, Zhenhuai

AU - Guo, Shuai

AU - Wang, Peng

AU - Geng, Fangjuan

AU - Han, Jiecai

AU - Zhu, Jiaqi

PY - 2019/5/15

Y1 - 2019/5/15

N2 - As lanthanum oxide (La2O3) has a large bandgap, it exhibits excellent optical properties. In this work, La2O3 thin films are prepared by the sol-gel method from a lanthanum chloride (LaCl3) precursor, on quartz and sapphire (0001) substrates. The effect of the annealing temperature (400–800 °C) on the optical properties of the La2O3 films is investigated. The structure and optical properties are analyzed by X-ray diffraction, atomic force microscopy, scanning electronic microscopy, X-ray photoemission spectroscopy, Raman spectroscopy, ultraviolet (UV)–visible spectroscopy, Fourier transform infrared spectroscopy, and infrared variable angle spectroscopic ellipsometry. Results indicate that with an annealing temperature of ~600 °C, the roughness and optical properties of La2O3 films can be significantly improved.

AB - As lanthanum oxide (La2O3) has a large bandgap, it exhibits excellent optical properties. In this work, La2O3 thin films are prepared by the sol-gel method from a lanthanum chloride (LaCl3) precursor, on quartz and sapphire (0001) substrates. The effect of the annealing temperature (400–800 °C) on the optical properties of the La2O3 films is investigated. The structure and optical properties are analyzed by X-ray diffraction, atomic force microscopy, scanning electronic microscopy, X-ray photoemission spectroscopy, Raman spectroscopy, ultraviolet (UV)–visible spectroscopy, Fourier transform infrared spectroscopy, and infrared variable angle spectroscopic ellipsometry. Results indicate that with an annealing temperature of ~600 °C, the roughness and optical properties of La2O3 films can be significantly improved.

KW - Annealing temperature

KW - LaO films

KW - Optical properties

UR - https://www.scopus.com/pages/publications/85049316143

U2 - 10.1016/j.surfcoat.2018.07.001

DO - 10.1016/j.surfcoat.2018.07.001

M3 - 文章

AN - SCOPUS:85049316143

SN - 0257-8972

VL - 365

SP - 164

EP - 172

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Investigation of the effect of annealing temperature on optical properties of lanthanum-oxide thin films prepared by sol-gel method

Abstract

Keywords

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