Abstract
The efficacy and enhancement study mechanism of plasma immersion ion implantation (PIII) technique using hot filament glow discharge plasma at elevated temprature and low pressure is examined. This technique was used to improve the surface properties of austentite stainless-steel. The experiments revealed that the nitrogen depth profiles is dependent on implantation voltages. Due to the higher oxidation partial pressure the surface oxidation was very severe. The working gas pressure is important factor in deciding the effectiveness of the process.
| Original language | English |
|---|---|
| Pages (from-to) | 1008-1012 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 19 |
| Issue number | 3 |
| DOIs | |
| State | Published - May 2001 |
| Externally published | Yes |
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