Investigation into the role of Si and SiC phases in RB-SiC ceramics surface modified ultra-precision grinding

RB-SiC ceramic has greater specific stiffness and thermal stability as space optical materials in the field of deep space exploration. To ultra-precision grinding advanced manufacturing technology drawbacks, a fabrication of highly shape accuracy and surface quality and surface modification assisted processing at room temperature. The RB-SiC ceramics are modified by plasma torches to produce compounds with lower hardness values, an exceptional surface quality (S_a surface roughness of [0.481, 0.959]), and has excellent thermal and chemical stability after surface modification process via 100 °C plasma torch at room temperature environment, which makes it an ideal suitable for the deep space exploration conditions such as space optical materials. In addition, oxygen(O₂) plasma surface modification and finite element simulation force-heat conduction of RB-SiC ceramic hard-brittle materials surface grinding force were compared with advanced manufacturing experiments of the precision grinding, revealing the formation mechanism and influence mechanism of surface micro-morphology during micro-cutting of precision grinding finish surface. The advanced manufacturing precision grinding difficulties of RB-SiC ceramic oxygen plasma torch reducing subsurface damage and removing space optical hard-brittle materials via ultra-precision grinding process of resin-funded corundum grinding wheel were solved. Subsurface damage (SSD) was effectively inhibited and its formation mechanism model.