Investigation into the role of cold atmospheric plasma on the precision grinding of RB-SiC ceramic at room temperature

RB-SiC ceramic is one of the most important and useful materials as optical precision elements in many scientific research fields. In this paper, a novel cold atmospheric plasma (CAP) process via oxygen (O₂), which is based on the precision grinding process in surface technology to modify at room temperature for grinding with a combination of plasma oxidation surface modification, is proposed. To identify the performance of the proposed cold atmospheric plasma process via oxygen method on the surface modification of RB-SiC ceramic fabrication of the precision grinding process, precision grinding test was conducted. To reveal the fundamental issue in the grinding of RB-SiC ceramic, surface-modified layer and mathematical model of the grinding trajectory via the point P(A_i, A_j) model analysis were conducted to investigate the effect of the composite process on grinding force and the mechanism of surface material removal in the presence of plasma oxidation. As a result of the method included the kept constant during the precision grinding of the composite process self-adaption-grinding process to avoid the deviation caused by second grinding particle entry. As a summary, we provide a significant cold atmospheric plasma-precision grinding compound process toward the establishment of the basic theory by analyzing the mechanism of the experimental test design and computation. The process and technical difficulties of RB-SiC ceramic and mechanism of surface modified layer material removal during precision grinding were solved. Graphical abstract: The single-precision grinding and compositeprocess schematic diagram process of the grinding wheel: (a) Traditional precision grinding process; (b) Cold atmospheric plasma(CAP) via oxygen (O₂) based on the precision grinding process. [Figure not available: see fulltext.].