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Integrated strip and slot waveguides in silicon-on-sapphire for mid infrared VOC detection in water

  • Yi Zou
  • , Harish Subbaraman
  • , Swapnajit Chakravarty
  • , Xiaochuan Xu
  • , Amir Hosseini
  • , Wei Cheng Lai
  • , Ray T. Chen
  • University of Texas at Austin
  • Omega Optics Inc.

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A chip integrated infrared spectrometer for in situ sensing and spectroscopic identification of VOCs in water probing large absorption cross sections of VOCs in the mid-infrared is desired. Preliminary strip and slot waveguide devices fabricated in silicon-on-sapphire for operation at 3.4μm wavelength experimentally demonstrated propagation loss of 2.1dB/cm for strip waveguides and 11dB/cm for slot waveguide. VOC are extracted from water using PDMS for solid phase micro-extraction and enables absorbance measurements independent from the strong absorbance of water. Absorbance of xylene as a typical VOC is determined on chip from the difference in transmitted intensity in the presence and absence of xylene.

Original languageEnglish
Title of host publicationSilicon Photonics IX
PublisherSPIE
ISBN (Print)9780819499035
DOIs
StatePublished - 2014
Externally publishedYes
EventSilicon Photonics IX - San Francisco, CA, United States
Duration: 3 Feb 20145 Feb 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8990
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceSilicon Photonics IX
Country/TerritoryUnited States
CitySan Francisco, CA
Period3/02/145/02/14

Keywords

  • Mid-infrared
  • Spectroscopy
  • Waveguides

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