Integrated 6-DOF parallel micro-positioning robot

A piezoelectric element driven 6-DOF parallel micro-positioning robot is designed based on integration of mechanism, driver and measurement. By using the 6-SPS mechanism to develop the parallel robot, the mechanical parameters of the structure are optimized, and the working space and stiffness of the structure are analyzed. Then the driver, sensor and controller are integrated together with a defined internal bus based on the modularization. Finally, the poses of a parallel robot are measured both in open loop and close loop control conditions, and the error compensation is executed. The experimental results indicate that the liner precision and the rotation precision are 10 nm and 0.0001° respectively, which shows that the robot has high positioning precision and high reliability, and can be used expediently for the high integration structure.