Influential factors of low-energy C₃₆ cluster deposition on diamond (100) crystal plane

Brenner-LJ potential is adopted to describe the interactivity between diamond and C₃₆ cluster, and the deposition mechanism of multi-C ₃₆ on the diamond surface is researched by molecular dynamics simulation. Through simulative experiments the incident energy, incident point, incident posture, incident angle and other factors are analyzed. Studies discover that the minimal deposition threshold is 20 eV and the maximum is 60 eV with the different incident point locations and incident postures of C ₃₆ clusters. When the incident angle is not over 60°, C ₃₆ may roll or slip to the region of smaller bonding energy and then bond. So the bonding probability is raised. Research results show that when incident angle is between 0° and 20° and incident energy range is from 30 eV to 60 eV, it is the optimal condition of single C₃₆ cluster deposition on diamond (100) crystal plane.