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Influence of waterproof films on the atomization behavior of surface acoustic waves

  • Qing Yun Huang
  • , Hong Hu*
  • , Jun Long Han
  • , Yu Lin Lei
  • , Xiao Qing Yang
  • *Corresponding author for this work
  • Harbin Institute of Technology Shenzhen

Research output: Contribution to journalArticlepeer-review

Abstract

One of the reasons why commercial application of surface acoustic wave (SAW) atomization is not possible is due to the condensation of aerosol droplets generated during atomization, which drip on the interdigitated transducer (IDT), thereby causing electrodes to short-circuit. In order to solve this problem, a SU-8-2002 film coating on an IDT is proposed in this paper. The waterproof performance of the film coating was tested on a surface acoustic wave (SAW) device several times. The experimental results reveal that the film coating was robust. The experiment also investigated the effects of the SU-8-2002 film on atomization behavior and heating.

Original languageEnglish
Article number794
JournalMicromachines
Volume10
Issue number11
DOIs
StatePublished - 1 Nov 2019
Externally publishedYes

Keywords

  • Atomization behavior
  • Film coating
  • Surface acoustic wave (SAW)

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