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Influence of the ex-situ and in-situ annealed self-buffer layer on ZnO film

  • Jinzhong Wang*
  • , Vincent Sallet
  • , Gaëlle Amiri
  • , Jean François Rommelluere
  • , Alain Lusson
  • , E. Rzepka
  • , John E. Lewis
  • , Pierre Galtier
  • , Elvira Fortunato
  • , Rodrigo Martins
  • , Ouri Gorochov
  • *Corresponding author for this work
  • NOVA University Lisbon
  • C.N.R.S.
  • SUNY Plattsburgh

Research output: Contribution to journalConference articlepeer-review

Abstract

Two self-buffer layers were grown on c-plane sapphire substrates by atmospheric MOCVD method using DEZn, tert-butanol as precursors and H 2 as carrier gas. Then, they were respectively annealed in growth process and oxygen environment. After that, ZnO films were respectively grown on them. XRD spectra show that all the films were grown in [002] orientation. Furthermore, the film with a buffer layer annealed in oxygen exhibits much higher crystal quality. Its FWHM of the rocking curve is only 567arcsec. Furthermore, its Raman scattering spectrum appears a much stronger E2 mode peak at 436cm-1 and its PL spectrum appears a shoulder at 3.367eV on the higher energy side.

Original languageEnglish
Pages (from-to)1010-1013
Number of pages4
JournalPhysica Status Solidi C: Conferences
Volume3
Issue number4
DOIs
StatePublished - 2006
Externally publishedYes
Event12th International Conference on II-VI Compounds - Warsaw, Poland
Duration: 12 Sep 200516 Sep 2005

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