Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition

Z. W. Xie; L. P. Wang; X. F. Wang; L. Huang; Y. Lu; J. C. Yan

doi:10.1016/j.nimb.2011.10.011

Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition

Z. W. Xie
, L. P. Wang^*
, X. F. Wang
, L. Huang
, Y. Lu
, J. C. Yan

^*Corresponding author for this work

School of Materials Science and Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

TiAlSiN nanocomposite and TiN coatings were synthesized by multi-plasma immersion ion implantation and deposition. The structure, hardness and tribological properties of both coatings oxidized at 800°C were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, high resolution transmission electron microscopy, nano-indentation and ball-on-disk tests. The results show that the TiN coating was oxidized almost completely after air exposure at 800°C. Except for a thin oxidized layer formed on the top surface containing TiO ₂, Al ₂O ₃ and SiO ₂, the cross section of the TiAlSiN coating remained in its original configuration after oxidation. Analysis revealed that the oxidized layer remained in a similar structure as before oxidation, which is TiO ₂ nanocrystals embedded in an amorphous SiO ₂ matrix. The hardness results show that the TiAlSiN coating after oxidation maintained a similar hardness as the un-oxidized coating. In addition, the TiAlSiN coating also showed a high wear resistance at 800°C.

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	271
DOIs	https://doi.org/10.1016/j.nimb.2011.10.011
State	Published - 15 Jan 2012

Keywords

Coating
Hardness
Oxidation
TiAlSiN
Wear

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10.1016/j.nimb.2011.10.011

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Xie, Z. W., Wang, L. P., Wang, X. F., Huang, L., Lu, Y., & Yan, J. C. (2012). Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 271, 1-5. https://doi.org/10.1016/j.nimb.2011.10.011

@article{e6609880c75a4274a3975b4661e64d87,

title = "Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition",

abstract = "TiAlSiN nanocomposite and TiN coatings were synthesized by multi-plasma immersion ion implantation and deposition. The structure, hardness and tribological properties of both coatings oxidized at 800°C were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, high resolution transmission electron microscopy, nano-indentation and ball-on-disk tests. The results show that the TiN coating was oxidized almost completely after air exposure at 800°C. Except for a thin oxidized layer formed on the top surface containing TiO 2, Al 2O 3 and SiO 2, the cross section of the TiAlSiN coating remained in its original configuration after oxidation. Analysis revealed that the oxidized layer remained in a similar structure as before oxidation, which is TiO 2 nanocrystals embedded in an amorphous SiO 2 matrix. The hardness results show that the TiAlSiN coating after oxidation maintained a similar hardness as the un-oxidized coating. In addition, the TiAlSiN coating also showed a high wear resistance at 800°C.",

keywords = "Coating, Hardness, Oxidation, TiAlSiN, Wear",

author = "Xie, \{Z. W.\} and Wang, \{L. P.\} and Wang, \{X. F.\} and L. Huang and Y. Lu and Yan, \{J. C.\}",

year = "2012",

month = jan,

day = "15",

doi = "10.1016/j.nimb.2011.10.011",

language = "英语",

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Xie, ZW, Wang, LP, Wang, XF, Huang, L, Lu, Y & Yan, JC 2012, 'Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 271, pp. 1-5. https://doi.org/10.1016/j.nimb.2011.10.011

Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition. / Xie, Z. W.; Wang, L. P.; Wang, X. F. et al.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 271, 15.01.2012, p. 1-5.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition

AU - Xie, Z. W.

AU - Wang, L. P.

AU - Wang, X. F.

AU - Huang, L.

AU - Lu, Y.

AU - Yan, J. C.

PY - 2012/1/15

Y1 - 2012/1/15

N2 - TiAlSiN nanocomposite and TiN coatings were synthesized by multi-plasma immersion ion implantation and deposition. The structure, hardness and tribological properties of both coatings oxidized at 800°C were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, high resolution transmission electron microscopy, nano-indentation and ball-on-disk tests. The results show that the TiN coating was oxidized almost completely after air exposure at 800°C. Except for a thin oxidized layer formed on the top surface containing TiO 2, Al 2O 3 and SiO 2, the cross section of the TiAlSiN coating remained in its original configuration after oxidation. Analysis revealed that the oxidized layer remained in a similar structure as before oxidation, which is TiO 2 nanocrystals embedded in an amorphous SiO 2 matrix. The hardness results show that the TiAlSiN coating after oxidation maintained a similar hardness as the un-oxidized coating. In addition, the TiAlSiN coating also showed a high wear resistance at 800°C.

AB - TiAlSiN nanocomposite and TiN coatings were synthesized by multi-plasma immersion ion implantation and deposition. The structure, hardness and tribological properties of both coatings oxidized at 800°C were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, high resolution transmission electron microscopy, nano-indentation and ball-on-disk tests. The results show that the TiN coating was oxidized almost completely after air exposure at 800°C. Except for a thin oxidized layer formed on the top surface containing TiO 2, Al 2O 3 and SiO 2, the cross section of the TiAlSiN coating remained in its original configuration after oxidation. Analysis revealed that the oxidized layer remained in a similar structure as before oxidation, which is TiO 2 nanocrystals embedded in an amorphous SiO 2 matrix. The hardness results show that the TiAlSiN coating after oxidation maintained a similar hardness as the un-oxidized coating. In addition, the TiAlSiN coating also showed a high wear resistance at 800°C.

KW - Coating

KW - Hardness

KW - Oxidation

KW - TiAlSiN

KW - Wear

UR - https://www.scopus.com/pages/publications/81255123275

U2 - 10.1016/j.nimb.2011.10.011

DO - 10.1016/j.nimb.2011.10.011

M3 - 文章

AN - SCOPUS:81255123275

SN - 0168-583X

VL - 271

SP - 1

EP - 5

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition

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