Influence of niobium addition on structure and mechanical properties of W-Nb-N coatings

Fuxing Ye; Hongjian Zhao; Xiubo Tian

doi:10.1016/j.vacuum.2017.07.008

Influence of niobium addition on structure and mechanical properties of W-Nb-N coatings

Fuxing Ye
, Hongjian Zhao^*
, Xiubo Tian

^*Corresponding author for this work

School of Materials Science and Engineering

Harbin Institute of Technology
Tianjin University

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

W-Nb-N coatings with Nb content ranging from 0 to 13.2 at.% were deposited by reactive magnetron sputtering technique. The influence of Nb content on the structure and mechanical properties was investigated. The results show that Nb atoms substitute W atoms forming the solid solution W-Nb-N. All the coatings exhibit a single-phase face-centered cubic (fcc) structure and the preferred orientation changes from (200) to (111) with Nb addition. The grain size of W-Nb-N coatings decreases with the increase of Nb content. The hardness and elastic modulus of W-Nb-N coatings increase gradually from 28.0 GPa to 320 GPa at 0 at.% Nb to 36.0 GPa and 386 GP at 13.2 at.% Nb, respectively. The adhesion between coatings and Si substrate also could be improved by Nb addition.

Original language	English
Pages (from-to)	8-13
Number of pages	6
Journal	Vacuum
Volume	144
DOIs	https://doi.org/10.1016/j.vacuum.2017.07.008
State	Published - Oct 2017

Keywords

Adhesion
Hardness
Structure
W-Nb-N coating

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10.1016/j.vacuum.2017.07.008

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title = "Influence of niobium addition on structure and mechanical properties of W-Nb-N coatings",

abstract = "W-Nb-N coatings with Nb content ranging from 0 to 13.2 at.\% were deposited by reactive magnetron sputtering technique. The influence of Nb content on the structure and mechanical properties was investigated. The results show that Nb atoms substitute W atoms forming the solid solution W-Nb-N. All the coatings exhibit a single-phase face-centered cubic (fcc) structure and the preferred orientation changes from (200) to (111) with Nb addition. The grain size of W-Nb-N coatings decreases with the increase of Nb content. The hardness and elastic modulus of W-Nb-N coatings increase gradually from 28.0 GPa to 320 GPa at 0 at.\% Nb to 36.0 GPa and 386 GP at 13.2 at.\% Nb, respectively. The adhesion between coatings and Si substrate also could be improved by Nb addition.",

keywords = "Adhesion, Hardness, Structure, W-Nb-N coating",

author = "Fuxing Ye and Hongjian Zhao and Xiubo Tian",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier Ltd",

year = "2017",

month = oct,

doi = "10.1016/j.vacuum.2017.07.008",

language = "英语",

volume = "144",

pages = "8--13",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd",

}

TY - JOUR

T1 - Influence of niobium addition on structure and mechanical properties of W-Nb-N coatings

AU - Ye, Fuxing

AU - Zhao, Hongjian

AU - Tian, Xiubo

PY - 2017/10

Y1 - 2017/10

N2 - W-Nb-N coatings with Nb content ranging from 0 to 13.2 at.% were deposited by reactive magnetron sputtering technique. The influence of Nb content on the structure and mechanical properties was investigated. The results show that Nb atoms substitute W atoms forming the solid solution W-Nb-N. All the coatings exhibit a single-phase face-centered cubic (fcc) structure and the preferred orientation changes from (200) to (111) with Nb addition. The grain size of W-Nb-N coatings decreases with the increase of Nb content. The hardness and elastic modulus of W-Nb-N coatings increase gradually from 28.0 GPa to 320 GPa at 0 at.% Nb to 36.0 GPa and 386 GP at 13.2 at.% Nb, respectively. The adhesion between coatings and Si substrate also could be improved by Nb addition.

AB - W-Nb-N coatings with Nb content ranging from 0 to 13.2 at.% were deposited by reactive magnetron sputtering technique. The influence of Nb content on the structure and mechanical properties was investigated. The results show that Nb atoms substitute W atoms forming the solid solution W-Nb-N. All the coatings exhibit a single-phase face-centered cubic (fcc) structure and the preferred orientation changes from (200) to (111) with Nb addition. The grain size of W-Nb-N coatings decreases with the increase of Nb content. The hardness and elastic modulus of W-Nb-N coatings increase gradually from 28.0 GPa to 320 GPa at 0 at.% Nb to 36.0 GPa and 386 GP at 13.2 at.% Nb, respectively. The adhesion between coatings and Si substrate also could be improved by Nb addition.

KW - Adhesion

KW - Hardness

KW - Structure

KW - W-Nb-N coating

UR - https://www.scopus.com/pages/publications/85023610936

U2 - 10.1016/j.vacuum.2017.07.008

DO - 10.1016/j.vacuum.2017.07.008

M3 - 文章

AN - SCOPUS:85023610936

SN - 0042-207X

VL - 144

SP - 8

EP - 13

JO - Vacuum

JF - Vacuum

ER -

Influence of niobium addition on structure and mechanical properties of W-Nb-N coatings

Abstract

Keywords

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