Abstract
Ti6Al4V was implanted by oxygen plasma based ion implantation at pulsed negative voltages of 50kV with a fluence of 4×1017 O/cm2. The implanting temperature of below 180°C was controlled by an oil cooling working table. Subsequent annealing was applied the implanted samples in vacuum at 600°C, 650°C and 700°C, respectively. The influence of annealing conditions on hardness and scratch resistance of the oxygen-implanted layer was investigated. The annealing at a lower temperature below 650°C makes the hardness peak widen and shift into the substrate. Scratch resistance of the oxygen implanted layer also was improved significantly. While the temperature increases to 650°C and 700°C, annealing induces a hardness valley value, which is even far lower than that of the substrate. At the same time, scratch resistance deteriorates for the oxygen implanted layer. All annealing samples have a higher elasticity recover than the implanted samples.
| Original language | English |
|---|---|
| Pages (from-to) | S224-S227 |
| Journal | Surface and Coatings Technology |
| Volume | 228 |
| Issue number | SUPPL.1 |
| DOIs | |
| State | Published - 15 Aug 2013 |
| Externally published | Yes |
Keywords
- Annealing
- Hardness
- Oxygen-implanted layer
- Scratch resistance
- Ti6Al4V
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