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Indentation and scratch tests on sputtered amorphous CNX films deposited on plasma-nitrided Ti-6Al-4V

  • Yongqing Fu
  • , Nee Lam Loh
  • , Bibo Yan
  • , Jun Wei
  • Nanyang Technological University
  • Agency for Science, Technology and Research, Singapore

Research output: Contribution to journalArticlepeer-review

Abstract

Sputtered carbon nitride (CNX) films were deposited on both untreated and plasma-nitrided Ti-6Al-4V substrates. Surface and cross-section morphology of the deposited CNX films was studied by scanning electron microscopy (SEM). Modified Vickers hardness tests showed that the intrinsic hardness of the CNX film was about HV 2000 to 3000. Both the indentation and scratch tests showed that, compared with the CNX film deposited on Ti-6Al-4V substrate, the load-bearing capacity of CNX film deposited on a plasma-nitrided layer was improved dramatically. From the results of scratch tests, the duplex-treated system was effective in maintaining a favorable low and stable coefficient of friction and improving the wear resistance of Ti-6Al-4V substrate.

Original languageEnglish
Pages (from-to)499-505
Number of pages7
JournalJournal of Materials Engineering and Performance
Volume9
Issue number5
DOIs
StatePublished - Oct 2000
Externally publishedYes

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