Abstract
Barium strontium titanate (BST) ceramic film is prepared on titanium substrate by micro-plasma oxidation. It is discussed that the influence of Ba/Sr molar ratio on ceramic film composition. The composition, morphology and element distribution of ceramic film are analyzed. It is indicated that the BST ceramic film with relatively smooth surface and homogeneous element composition can be formed in the condition of selected processing parameters.
| Original language | English |
|---|---|
| Pages (from-to) | 859-861 |
| Number of pages | 3 |
| Journal | Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering |
| Volume | 32 |
| Issue number | 10 |
| State | Published - Oct 2003 |
Keywords
- Barium strontium titanate
- In-situ growth
- Micro-plasma oxidation
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