Improving the impact energy by using auxiliary electrode in a cylindrical bore

X. C. Zeng; S. Y. Wang; D. Z. Xing; Y. Gao; A. G. Liu; B. Y. Tang; P. K. Chu

Improving the impact energy by using auxiliary electrode in a cylindrical bore

X. C. Zeng^*
, S. Y. Wang
, D. Z. Xing
, Y. Gao
, A. G. Liu
, B. Y. Tang
, P. K. Chu

^*Corresponding author for this work

City University of Hong Kong

Research output: Contribution to journal › Conference article › peer-review

Abstract

Recent research results indicate that ion implantation in small bores is not very promising because the ion-matrix sheath overlap reduces the impact energy of the ions. The present authors are proposing to use an auxiliary electrode, a conductive cylindrical bar with potential which is always zero at the axis of the cylindrical bore, to improve the impact energy. They have calculated the structure of the ion-matrix sheath in an infinitely long cylindrical bore (R≤D) with the auxiliary electrode and analyzed the dependence of its radius on the electric field in the bore. The results show that the auxiliary electrode improves the distribution of the potential and electric field in the cylindrical bore. Because the presence of the auxiliary electrode generates an electric field which does not change when the ions are implanted into the sidewalls, it is hoped that this technique can improve the impact energy for plasma immersion ion implantation into the interior sidewalls of a cylindrical bore.

Original language	English
Pages (from-to)	176
Number of pages	1
Journal	IEEE International Conference on Plasma Science
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 IEEE International Conference on Plasma Science - Boston, MA, USA Duration: 3 Jun 1996 → 5 Jun 1996

Cite this

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title = "Improving the impact energy by using auxiliary electrode in a cylindrical bore",

abstract = "Recent research results indicate that ion implantation in small bores is not very promising because the ion-matrix sheath overlap reduces the impact energy of the ions. The present authors are proposing to use an auxiliary electrode, a conductive cylindrical bar with potential which is always zero at the axis of the cylindrical bore, to improve the impact energy. They have calculated the structure of the ion-matrix sheath in an infinitely long cylindrical bore (R≤D) with the auxiliary electrode and analyzed the dependence of its radius on the electric field in the bore. The results show that the auxiliary electrode improves the distribution of the potential and electric field in the cylindrical bore. Because the presence of the auxiliary electrode generates an electric field which does not change when the ions are implanted into the sidewalls, it is hoped that this technique can improve the impact energy for plasma immersion ion implantation into the interior sidewalls of a cylindrical bore.",

author = "Zeng, \{X. C.\} and Wang, \{S. Y.\} and Xing, \{D. Z.\} and Y. Gao and Liu, \{A. G.\} and Tang, \{B. Y.\} and Chu, \{P. K.\}",

year = "1996",

language = "英语",

pages = "176",

journal = "IEEE International Conference on Plasma Science",

issn = "0730-9244",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1996 IEEE International Conference on Plasma Science ; Conference date: 03-06-1996 Through 05-06-1996",

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TY - JOUR

T1 - Improving the impact energy by using auxiliary electrode in a cylindrical bore

AU - Zeng, X. C.

AU - Wang, S. Y.

AU - Xing, D. Z.

AU - Gao, Y.

AU - Liu, A. G.

AU - Tang, B. Y.

AU - Chu, P. K.

PY - 1996

Y1 - 1996

N2 - Recent research results indicate that ion implantation in small bores is not very promising because the ion-matrix sheath overlap reduces the impact energy of the ions. The present authors are proposing to use an auxiliary electrode, a conductive cylindrical bar with potential which is always zero at the axis of the cylindrical bore, to improve the impact energy. They have calculated the structure of the ion-matrix sheath in an infinitely long cylindrical bore (R≤D) with the auxiliary electrode and analyzed the dependence of its radius on the electric field in the bore. The results show that the auxiliary electrode improves the distribution of the potential and electric field in the cylindrical bore. Because the presence of the auxiliary electrode generates an electric field which does not change when the ions are implanted into the sidewalls, it is hoped that this technique can improve the impact energy for plasma immersion ion implantation into the interior sidewalls of a cylindrical bore.

AB - Recent research results indicate that ion implantation in small bores is not very promising because the ion-matrix sheath overlap reduces the impact energy of the ions. The present authors are proposing to use an auxiliary electrode, a conductive cylindrical bar with potential which is always zero at the axis of the cylindrical bore, to improve the impact energy. They have calculated the structure of the ion-matrix sheath in an infinitely long cylindrical bore (R≤D) with the auxiliary electrode and analyzed the dependence of its radius on the electric field in the bore. The results show that the auxiliary electrode improves the distribution of the potential and electric field in the cylindrical bore. Because the presence of the auxiliary electrode generates an electric field which does not change when the ions are implanted into the sidewalls, it is hoped that this technique can improve the impact energy for plasma immersion ion implantation into the interior sidewalls of a cylindrical bore.

UR - https://www.scopus.com/pages/publications/0029722116

M3 - 会议文章

AN - SCOPUS:0029722116

SN - 0730-9244

SP - 176

JO - IEEE International Conference on Plasma Science

JF - IEEE International Conference on Plasma Science

T2 - Proceedings of the 1996 IEEE International Conference on Plasma Science

Y2 - 3 June 1996 through 5 June 1996

ER -

Improving the impact energy by using auxiliary electrode in a cylindrical bore

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