@inproceedings{d32ea88d65554acb873797c42662485b,
title = "Improved variable EWMA controller design",
abstract = "The exponentially weighted moving average (EWMA) controller is a popular run-to-run (RtR) control scheme in semiconductor manufacturing because of its effectiveness and simplicity. In this paper we propose an improved variable EWMA controller design method. The optimal discount factor of the EWMA controller is determined by minimizing the mean square error (MSE) of process output at each run. The proposed method overcomes some potential problems of Tseng's method and can be applied to general autoregressive integrated moving average (ARIMA) processes. Simulation examples are given to show the effectiveness of the proposed method.",
keywords = "EWMA, Run-to-run control, Semiconductor manufacturing, Variable discount factor",
author = "Ma, \{Ming Da\} and Li, \{Jia Yi\} and Kai Zhang",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 11th World Congress on Intelligent Control and Automation, WCICA 2014 ; Conference date: 29-06-2014 Through 04-07-2014",
year = "2015",
month = mar,
day = "2",
doi = "10.1109/WCICA.2014.7053439",
language = "英语",
series = "Proceedings of the World Congress on Intelligent Control and Automation (WCICA)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "March",
pages = "4316--4320",
booktitle = "Proceeding of the 11th World Congress on Intelligent Control and Automation, WCICA 2014",
address = "美国",
edition = "March",
}