Abstract
Dielectric/metal/dielectric-structured transparent conductive films are prone to structural and functional failures under thermal oxidation environment. Herein, a Ni layer was employed to improve the photoelectric stability of AZO/Ag/AZO multilayer films. The AZO/Ni/Ag/AZO film exhibited a transmittance of 75%, surface resistance of ~7 Ω/sq, and stable structure after thermal oxidation treatment at 500 °C. The visible light transmittance, surface resistance, and figure of merit values of the AZO/Ag/AZO and AZO/Ni/Ag/AZO films were determined after high-temperature treatment in ambient air. The diffusion of Ag was effectively inhibited by the Ni layer, and the photoelectric stability of AZO/Ag/AZO films was improved under thermal environment.
| Original language | English |
|---|---|
| Article number | 128844 |
| Journal | Materials Letters |
| Volume | 282 |
| DOIs | |
| State | Published - 1 Jan 2021 |
| Externally published | Yes |
Keywords
- Optical materials and properties
- Photoelectric stability
- Sputtering
- Thin films
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