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Improved stability of dielectric/metal/dielectric-structured transparent conductive films with the insertion of Ni layer under thermal oxidation environment

  • Zhibo Zhang
  • , Xinyu Zhang
  • , Liangge Xu*
  • , Yanan Yang
  • , Pingping Min
  • , Ruicong Zhang
  • , Lei Yang
  • , Andrey Bolshakov
  • , Jiaqi Zhu
  • *Corresponding author for this work
  • National Key Laboratory of Science and Technology on Advanced Composites in Special Environment
  • Harbin Institute of Technology
  • Ministry of Education of the People's Republic of China

Research output: Contribution to journalArticlepeer-review

Abstract

Dielectric/metal/dielectric-structured transparent conductive films are prone to structural and functional failures under thermal oxidation environment. Herein, a Ni layer was employed to improve the photoelectric stability of AZO/Ag/AZO multilayer films. The AZO/Ni/Ag/AZO film exhibited a transmittance of 75%, surface resistance of ~7 Ω/sq, and stable structure after thermal oxidation treatment at 500 °C. The visible light transmittance, surface resistance, and figure of merit values of the AZO/Ag/AZO and AZO/Ni/Ag/AZO films were determined after high-temperature treatment in ambient air. The diffusion of Ag was effectively inhibited by the Ni layer, and the photoelectric stability of AZO/Ag/AZO films was improved under thermal environment.

Original languageEnglish
Article number128844
JournalMaterials Letters
Volume282
DOIs
StatePublished - 1 Jan 2021
Externally publishedYes

Keywords

  • Optical materials and properties
  • Photoelectric stability
  • Sputtering
  • Thin films

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