@inproceedings{00f6bd32d5a44ad1ba3867b37d879218,
title = "Identifying the microtopographic features generated by different ultra-precision machining techniques by power spectral density",
abstract = "An atomic force microscope (AFM) was used to image the ultra-precision machined surfaces of K9 glasses, potassium dihydrogen phosphate (KDP) crystals, and silicon wafers. Each surface was generated by two machining techniques: (1) coarse-grain-sized diamond wheel grinding and regular polishing were used on K9 glasses; (2) single-point diamond turning and deliquescent polishing were performed on KDP crystals; (3) standard chemical mechanical polishing and atmospheric pressure low temperature plasma polishing were employed on silicon wafers. One-dimensional and two-dimensional power spectral densities (PSDs) of each sample surface were calculated from the measurement data. The influence of each machining process on the sample surface texture was analyzed based on the PSDs. The experiment results indicate that the power spectral density is a great guidance for the selection and improvement of ultra-precision machining techniques.",
keywords = "Atomic force microscopy, Power spectral density, Surface roughness, Ultra-precision machining technique",
author = "Jianchao Chen and Tao Sun",
year = "2015",
doi = "10.4028/www.scientific.net/KEM.625.73",
language = "英语",
isbn = "9783038352112",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "73--78",
booktitle = "Precision Engineering and Nanotechnology V",
address = "瑞士",
note = "5th International Conference on Asian Society for Precision Engineering and Nanotechnology, ASPEN 2013 ; Conference date: 12-11-2013 Through 15-11-2013",
}