Hysteresis compensator controller design of piezoelectric scanner system

In the fields of adaptive optics, space optical communications, laser processing and so on, laser scanner is one of the most important components. Traditional laser scanners based on piezoelectric ceramic stack are difficult to achieve good linear scanning. In order to resolve this problem, a laser scanner based on hysteresis compensator controller was designed. First of all, the configuration of piezoelectric scanner system components based on hysteresis compensator controller was introduced. Secondly, the principle and method of amending the piezoelectric scanner hysteresis loop were analyzed. Finally, the piezoelectric scanner was driven by the compensated driving signal. Experimental results show that the hysteresis characteristics have been well restrained and scanning linear performance of the piezoelectric scanner has been significantly improved using this method. The nonlinearity of 20 Hz triangle wave scanning reduces to less than 1% from 6%. The piezoelectric scanner also has other advantages such as large optical scanning angle, high first step resonance frequency, small size and simple structure.