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Hysteresis compensation and trajectory preshaping for piezoactuators in scanning applications

  • York University Toronto
  • Otto von Guericke University Magdeburg

Research output: Contribution to journalArticlepeer-review

Abstract

This paper focuses on the dynamics and control of piezoactuators (PEAs) for high-speed large-range scanning applications. Firstly, the nonlinear hysteresis is modeled by using a modified Maxwell resistive capacitor (MRC) model. Secondly, an inverse-based feedforward controller is proposed for this application with hysteresis compensation. Then, the scanning trajectories are preshaped by treating the hysteresis-compensated PEA as a linear system. Finally, experiments are conducted to verify the effectiveness of the proposed approaches.

Original languageEnglish
Article number015015
JournalSmart Materials and Structures
Volume23
Issue number1
DOIs
StatePublished - Jan 2014

Keywords

  • hysteresis compensation
  • open-loop control
  • piezoactuator (PEA)
  • scanning application
  • trajectory preshaping

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