Abstract
Recently the Joo-type heterodyne interferometer was invented to overcome the periodic nonlinearity, but there was less discussion about the optics thermal drift of Joo-type interferometer. In this paper, the optics thermal drift model of Joo-type interferometer is established, and a highly stable heterodyne interferometer is proposed. Experimental results show that, the proposed interferometer's periodic nonlinearity is 0.035 nm, while its optics thermal drift coefficient is 18 nm/°C approximately.
| Original language | English |
|---|---|
| Pages (from-to) | 246-254 |
| Number of pages | 9 |
| Journal | Technisches Messen |
| Volume | 81 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 2014 |
Keywords
- Joo-type heterodyne interferometer
- Optical path length
- Optics thermal drift
- Periodic nonlinearity
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