High temperature oxidation of Cr-N coatings prepared by high power pulsed magnetron sputtering - Plasma immersion ion implantation & deposition

Zhongzhen Wu; Xiubo Tian; Shu Xiao; Chunzhi Gong; Feng Pan; Paul K. Chu

doi:10.1016/j.vacuum.2014.06.002

High temperature oxidation of Cr-N coatings prepared by high power pulsed magnetron sputtering - Plasma immersion ion implantation & deposition

Zhongzhen Wu
, Xiubo Tian
, Shu Xiao
, Chunzhi Gong
, Feng Pan^*
, Paul K. Chu

^*Corresponding author for this work

School of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

Good oxidation and corrosion resistance are required for cutting tools and other industrial components used in high temperature applications. The highest operational temperature of CrN is normally about 500 °C. A denser Cr-N coating prepared by high power pulsed magnetron sputtering - plasma immersion ion implantation & deposition shows oxidation resistance up to 800 °C compare with those prepared by conventional magnetron sputtering. The hardness and corrosion resistance are shown and discussed. The enhanced performance can be attributed to a phase transition from CrN to Cr₂N during annealing and there is no obvious oxide formation on the coatings.

Original language	English
Pages (from-to)	66-70
Number of pages	5
Journal	Vacuum
Volume	108
DOIs	https://doi.org/10.1016/j.vacuum.2014.06.002
State	Published - Oct 2014

Keywords

Corrosion resistance
Cr-N
HPPMS-PIII&D
High temperature oxidation

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title = "High temperature oxidation of Cr-N coatings prepared by high power pulsed magnetron sputtering - Plasma immersion ion implantation \& deposition",

abstract = "Good oxidation and corrosion resistance are required for cutting tools and other industrial components used in high temperature applications. The highest operational temperature of CrN is normally about 500 °C. A denser Cr-N coating prepared by high power pulsed magnetron sputtering - plasma immersion ion implantation \& deposition shows oxidation resistance up to 800 °C compare with those prepared by conventional magnetron sputtering. The hardness and corrosion resistance are shown and discussed. The enhanced performance can be attributed to a phase transition from CrN to Cr2N during annealing and there is no obvious oxide formation on the coatings.",

keywords = "Corrosion resistance, Cr-N, HPPMS-PIII\&D, High temperature oxidation",

author = "Zhongzhen Wu and Xiubo Tian and Shu Xiao and Chunzhi Gong and Feng Pan and Chu, \{Paul K.\}",

year = "2014",

month = oct,

doi = "10.1016/j.vacuum.2014.06.002",

language = "英语",

volume = "108",

pages = "66--70",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd",

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TY - JOUR

T1 - High temperature oxidation of Cr-N coatings prepared by high power pulsed magnetron sputtering - Plasma immersion ion implantation & deposition

AU - Wu, Zhongzhen

AU - Tian, Xiubo

AU - Xiao, Shu

AU - Gong, Chunzhi

AU - Pan, Feng

AU - Chu, Paul K.

PY - 2014/10

Y1 - 2014/10

N2 - Good oxidation and corrosion resistance are required for cutting tools and other industrial components used in high temperature applications. The highest operational temperature of CrN is normally about 500 °C. A denser Cr-N coating prepared by high power pulsed magnetron sputtering - plasma immersion ion implantation & deposition shows oxidation resistance up to 800 °C compare with those prepared by conventional magnetron sputtering. The hardness and corrosion resistance are shown and discussed. The enhanced performance can be attributed to a phase transition from CrN to Cr2N during annealing and there is no obvious oxide formation on the coatings.

AB - Good oxidation and corrosion resistance are required for cutting tools and other industrial components used in high temperature applications. The highest operational temperature of CrN is normally about 500 °C. A denser Cr-N coating prepared by high power pulsed magnetron sputtering - plasma immersion ion implantation & deposition shows oxidation resistance up to 800 °C compare with those prepared by conventional magnetron sputtering. The hardness and corrosion resistance are shown and discussed. The enhanced performance can be attributed to a phase transition from CrN to Cr2N during annealing and there is no obvious oxide formation on the coatings.

KW - Corrosion resistance

KW - Cr-N

KW - HPPMS-PIII&D

KW - High temperature oxidation

UR - https://www.scopus.com/pages/publications/84903590436

U2 - 10.1016/j.vacuum.2014.06.002

DO - 10.1016/j.vacuum.2014.06.002

M3 - 文章

AN - SCOPUS:84903590436

SN - 0042-207X

VL - 108

SP - 66

EP - 70

JO - Vacuum

JF - Vacuum

ER -

High temperature oxidation of Cr-N coatings prepared by high power pulsed magnetron sputtering - Plasma immersion ion implantation & deposition

Abstract

Keywords

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