High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO3

E. S. Kim; Z. J. Wang; C. Wang; Z. Yao; J. G. Liang; N. Y. Kim

High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO₃

E. S. Kim
, Z. J. Wang
, C. Wang
, Z. Yao
, J. G. Liang
, N. Y. Kim

Kwangwoon University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Aerosol deposition (AD) is a shock-loading solidification ceramic film preparation technique exhibiting the advantages of room-temperature operation and highly efficient in film growth. Hygorscopic film which has a super mesoporous structure exhibits high sensitivies and fast response in humidity sensing. Our objective is to verify the feasibility of using AD by depositing BaTiO₃ films on a glass substrate with a Pt interdigital capacitor. Humidity sensing performances were evaluated by 400°C annealing temperature and 0.1-10 urn thickness of BaTiO₃. Films treatment in the thickness of 1.5 urn achieved excellent sensitivies in 178.6 ± 7.3 pF/%RH respectively. The surface hydrophilicity, pore volume, and open-pore ratio were analyzed as critical factors of the thickness related humidity sensing effects, and physical modeling exhibited an expanded humidity detection range, enhanced water vapor adsorption and desorption, and improved sensitivity to humidity.

Original language	English
Title of host publication	TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical
Editors	Bart Romanowicz, Fiona Case, Fiona Case, Matthew Laudon
Publisher	TechConnect
Pages	231-234
Number of pages	4
ISBN (Electronic)	9780998878249
State	Published - 2018
Externally published	Yes
Event	11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference - Anaheim, United States Duration: 13 May 2018 → 16 May 2018

Publication series

Name	TechConnect Briefs 2018 - Advanced Materials
Volume	3

Conference

Conference	11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference
Country/Territory	United States
City	Anaheim
Period	13/05/18 → 16/05/18

Keywords

Aerosol deposition (AD)
Humidity sensor
Post-annelaing
Sensitivity
Thickness effect

Cite this

Kim, E. S., Wang, Z. J., Wang, C., Yao, Z., Liang, J. G., & Kim, N. Y. (2018). High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO₃ In B. Romanowicz, F. Case, F. Case, & M. Laudon (Eds.), TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical (pp. 231-234). (TechConnect Briefs 2018 - Advanced Materials; Vol. 3). TechConnect.

Kim, E. S. ; Wang, Z. J. ; Wang, C. et al. / High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO₃ TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical. editor / Bart Romanowicz ; Fiona Case ; Fiona Case ; Matthew Laudon. TechConnect, 2018. pp. 231-234 (TechConnect Briefs 2018 - Advanced Materials).

@inproceedings{7f0ebcda286c492ca7b31136d7bfea46,

title = "High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO3 ",

abstract = "Aerosol deposition (AD) is a shock-loading solidification ceramic film preparation technique exhibiting the advantages of room-temperature operation and highly efficient in film growth. Hygorscopic film which has a super mesoporous structure exhibits high sensitivies and fast response in humidity sensing. Our objective is to verify the feasibility of using AD by depositing BaTiO3 films on a glass substrate with a Pt interdigital capacitor. Humidity sensing performances were evaluated by 400°C annealing temperature and 0.1-10 urn thickness of BaTiO3. Films treatment in the thickness of 1.5 urn achieved excellent sensitivies in 178.6 ± 7.3 pF/\%RH respectively. The surface hydrophilicity, pore volume, and open-pore ratio were analyzed as critical factors of the thickness related humidity sensing effects, and physical modeling exhibited an expanded humidity detection range, enhanced water vapor adsorption and desorption, and improved sensitivity to humidity.",

keywords = "Aerosol deposition (AD), Humidity sensor, Post-annelaing, Sensitivity, Thickness effect",

author = "Kim, \{E. S.\} and Wang, \{Z. J.\} and C. Wang and Z. Yao and Liang, \{J. G.\} and Kim, \{N. Y.\}",

note = "Publisher Copyright: {\textcopyright} 2018 OOSV. All rights reserved.; 11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference ; Conference date: 13-05-2018 Through 16-05-2018",

year = "2018",

language = "英语",

series = "TechConnect Briefs 2018 - Advanced Materials",

publisher = "TechConnect",

pages = "231--234",

editor = "Bart Romanowicz and Fiona Case and Fiona Case and Matthew Laudon",

booktitle = "TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical",

}

Kim, ES, Wang, ZJ, Wang, C, Yao, Z, Liang, JG & Kim, NY 2018, High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO₃ in B Romanowicz, F Case, F Case & M Laudon (eds), TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical. TechConnect Briefs 2018 - Advanced Materials, vol. 3, TechConnect, pp. 231-234, 11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference, Anaheim, United States, 13/05/18.

High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO₃ . / Kim, E. S.; Wang, Z. J.; Wang, C. et al.
TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical. ed. / Bart Romanowicz; Fiona Case; Fiona Case; Matthew Laudon. TechConnect, 2018. p. 231-234 (TechConnect Briefs 2018 - Advanced Materials; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO3

AU - Kim, E. S.

AU - Wang, Z. J.

AU - Wang, C.

AU - Yao, Z.

AU - Liang, J. G.

AU - Kim, N. Y.

PY - 2018

Y1 - 2018

N2 - Aerosol deposition (AD) is a shock-loading solidification ceramic film preparation technique exhibiting the advantages of room-temperature operation and highly efficient in film growth. Hygorscopic film which has a super mesoporous structure exhibits high sensitivies and fast response in humidity sensing. Our objective is to verify the feasibility of using AD by depositing BaTiO3 films on a glass substrate with a Pt interdigital capacitor. Humidity sensing performances were evaluated by 400°C annealing temperature and 0.1-10 urn thickness of BaTiO3. Films treatment in the thickness of 1.5 urn achieved excellent sensitivies in 178.6 ± 7.3 pF/%RH respectively. The surface hydrophilicity, pore volume, and open-pore ratio were analyzed as critical factors of the thickness related humidity sensing effects, and physical modeling exhibited an expanded humidity detection range, enhanced water vapor adsorption and desorption, and improved sensitivity to humidity.

AB - Aerosol deposition (AD) is a shock-loading solidification ceramic film preparation technique exhibiting the advantages of room-temperature operation and highly efficient in film growth. Hygorscopic film which has a super mesoporous structure exhibits high sensitivies and fast response in humidity sensing. Our objective is to verify the feasibility of using AD by depositing BaTiO3 films on a glass substrate with a Pt interdigital capacitor. Humidity sensing performances were evaluated by 400°C annealing temperature and 0.1-10 urn thickness of BaTiO3. Films treatment in the thickness of 1.5 urn achieved excellent sensitivies in 178.6 ± 7.3 pF/%RH respectively. The surface hydrophilicity, pore volume, and open-pore ratio were analyzed as critical factors of the thickness related humidity sensing effects, and physical modeling exhibited an expanded humidity detection range, enhanced water vapor adsorption and desorption, and improved sensitivity to humidity.

KW - Aerosol deposition (AD)

KW - Humidity sensor

KW - Post-annelaing

KW - Sensitivity

KW - Thickness effect

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M3 - 会议稿件

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T3 - TechConnect Briefs 2018 - Advanced Materials

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BT - TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical

A2 - Romanowicz, Bart

A2 - Case, Fiona

A2 - Laudon, Matthew

PB - TechConnect

T2 - 11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference

Y2 - 13 May 2018 through 16 May 2018

ER -

Kim ES, Wang ZJ, Wang C, Yao Z, Liang JG, Kim NY. High-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor on glass substrate by Aerosol deposited BaTiO₃ In Romanowicz B, Case F, Case F, Laudon M, editors, TechConnect Briefs 2018 - Biotech, Biomaterials and Biomedical. TechConnect. 2018. p. 231-234. (TechConnect Briefs 2018 - Advanced Materials).