High-quality fabrication of laser-induced periodic surface structures: bridging formation mechanisms and processing strategies

Laser-induced periodic surface structures (LIPSS) have attracted considerable attention in micro/nano-optics, sensing, and surface engineering for their ability to generate subwavelength periodic features and functionalize material surfaces. However, their practical application remains limited by challenges in period uniformity, orientation consistency, aspect ratio, and large-area scalability. Focusing on high-quality LIPSS fabrication, the review systematically examines recent progress in fundamental formation mechanisms and corresponding processing strategies, emphasizing the interplay among formation mechanisms, quality bottlenecks, and control approaches. From a mechanistic perspective, the decisive role of Sipe's electromagnetic theory in period selection, the influence of surface electromagnetic wave (SEW) and surface plasmon polariton (SPP) coupling on orientation control and large-area uniformity, the morphology evolution governed by heat transfer and melt flow coupling, and the contribution of localized near-field coupling to the formation of deep-subwavelength structures are critically discussed. On this basis, five key control factors are identified: the initial scattering state, electromagnetic coupling efficiency, transient carrier dynamics, heat transfer and melt flow coupling, and local field enhancement. In terms of processing strategies, current approaches for high-quality LIPSS fabrication are categorized into three groups, namely pretreatment, beam shaping, and post-treatment, which respectively enable initial boundary regulation, optimization of energy deposition, and refinement of modified regions. Their applicable scenarios, advantages, limitations, and effectiveness in improving key quality metrics, including period uniformity, orientation consistency, aspect ratio, and defect suppression, are compared and analyzed. Finally, the application prospects of LIPSS in micro/nano-optics, sensing, and functional surfaces are discussed, with multiphysics coupling modeling, unified quality evaluation, and data-driven optimization identified as crucial directions for future research. This review is intended to provide a systematic reference for understanding LIPSS formation mechanisms and optimizing high-quality fabrication processes.