High-precision small-scale laser focal spot measurements

Z. W. Lu; X. Y. Liu; X. Wang; D. X. Ba; Z. H. Jiang; P. Y. Du; C. Y. Zhu

doi:10.1017/S0263034612001073

High-precision small-scale laser focal spot measurements

Z. W. Lu^*
, X. Y. Liu
, X. Wang
, D. X. Ba
, Z. H. Jiang
, P. Y. Du
, C. Y. Zhu

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology
CAS - Changchun Institute of Optics Fine Mechanics and Physics

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 Âm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

Original language	English
Pages (from-to)	177-183
Number of pages	7
Journal	Laser and Particle Beams
Volume	31
Issue number	1
DOIs	https://doi.org/10.1017/S0263034612001073
State	Published - 2013

Keywords

Centroid position
Charge coupled device
High-precision measurement
Relative intensity distribution
Small-scale focal spot

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10.1017/S0263034612001073

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title = "High-precision small-scale laser focal spot measurements",

abstract = "In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 {\^A}m when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.",

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AU - Lu, Z. W.

AU - Liu, X. Y.

AU - Wang, X.

AU - Ba, D. X.

AU - Jiang, Z. H.

AU - Du, P. Y.

AU - Zhu, C. Y.

PY - 2013

Y1 - 2013

N2 - In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 Âm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

AB - In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 Âm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

KW - Centroid position

KW - Charge coupled device

KW - High-precision measurement

KW - Relative intensity distribution

KW - Small-scale focal spot

UR - https://www.scopus.com/pages/publications/84874479191

U2 - 10.1017/S0263034612001073

DO - 10.1017/S0263034612001073

M3 - 文章

AN - SCOPUS:84874479191

SN - 0263-0346

VL - 31

SP - 177

EP - 183

JO - Laser and Particle Beams

JF - Laser and Particle Beams

IS - 1

ER -

High-precision small-scale laser focal spot measurements

Abstract

Keywords

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