Abstract
A study of growth and structure of aligned B-C-N nanotubes prepared using bias assisted chemical vapor deposition was discussed. The polycrystalline nickle wafers which act as catalysts were used as substrates. The results showed that an important role is played by the discharge current on the aligned growth of the nanotubes. The area density of nanotubes was found to increase with an increase in the discharge current.
| Original language | English |
|---|---|
| Pages (from-to) | 671-674 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 19 |
| Issue number | 3 |
| DOIs | |
| State | Published - May 2001 |
| Externally published | Yes |
| Event | 13th International Vaccum Microelectronics Conference - Guangzhou, China Duration: 14 Aug 2000 → 17 Aug 2000 |
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