Abstract
Plasma physics is a discipline involving the laws of gas discharge. Gas discharge, composed of electrons, ions, and high-energy atoms, can ionize gas molecules and metal atoms into plasmas (the fourth state of matter). This chapter contains three parts. The first part is about the basic knowledge of plasma, mainly focusing on the definition, classification, and generation measures. The second part is about the types and generations of gas discharge, including the concepts of ionization, excitation, recombination processes, and the comparisons of glow discharge and arc discharge. The last part is about the effect of charged particles on anode or cathode material and their movement, which can be controlled by the electromagnetic field.
| Original language | English |
|---|---|
| Title of host publication | Modern Ion Plating Technology |
| Subtitle of host publication | Fundamentals and Applications |
| Publisher | Elsevier |
| Pages | 29-89 |
| Number of pages | 61 |
| ISBN (Electronic) | 9780323908337 |
| ISBN (Print) | 9780323908344 |
| DOIs | |
| State | Published - 1 Jan 2023 |
| Externally published | Yes |
Keywords
- Plasma
- atmospheric pressure glow discharge
- cathode sputtering
- coaxial electromagnetic field
- direct current glow discharge
- field-induced arc discharge
- gas discharge
- hot arc discharge
- microwave glow discharge
- orthogonal electromagnetic field
- radiofrequency glow discharge
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