Frequency response analysis of a stick-slip driven spherical micromanipulator

A two-mass-oscillator simplified engineering model for spherical micromanipulators was established under the condition of simplifying spherical higher pair joints. The frequency response features of the two-mass-oscillator with nonlinear elements were analyzed based on the Fourier series and harmonic balance method. The solution was demonstrated by the MATLAB simulation. The experiment was also done, and the validity of the analysis was further proved by the results. The simulation and experiment results proved that the spherical micromanipulator based on the stick- slip principle should be driven on the range of intermediate or low frequency, and the conclusion could be available for reference to micromanipulator control.