Formation of nanostructured metallic glass thin films upon sputtering

Sergey V. Ketov; Rastko Joksimovic; Guoqiang Xie; Artem Trifonov; Kazue Kurihara; Dmitri V. Louzguine-Luzgin

doi:10.1016/j.heliyon.2016.e00228

Formation of nanostructured metallic glass thin films upon sputtering

Sergey V. Ketov^*
, Rastko Joksimovic
, Guoqiang Xie
, Artem Trifonov
, Kazue Kurihara
, Dmitri V. Louzguine-Luzgin

^*Corresponding author for this work

Tohoku University
Lomonosov Moscow State University
National University of Science and Technology "MISiS"

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.

Original language	English
Article number	e00228
Journal	Heliyon
Volume	3
Issue number	1
DOIs	https://doi.org/10.1016/j.heliyon.2016.e00228
State	Published - 1 Jan 2017
Externally published	Yes

Keywords

Engineering
Materials science
Nanotechnology

Access to Document

10.1016/j.heliyon.2016.e00228

Cite this

@article{d7612d6c69d944f2b04c4b96b2c28a79,

title = "Formation of nanostructured metallic glass thin films upon sputtering",

abstract = "Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.",

keywords = "Engineering, Materials science, Nanotechnology",

author = "Ketov, \{Sergey V.\} and Rastko Joksimovic and Guoqiang Xie and Artem Trifonov and Kazue Kurihara and Louzguine-Luzgin, \{Dmitri V.\}",

note = "Publisher Copyright: {\textcopyright} 2017 The Authors",

year = "2017",

month = jan,

day = "1",

doi = "10.1016/j.heliyon.2016.e00228",

language = "英语",

volume = "3",

journal = "Heliyon",

issn = "2405-8440",

publisher = "Elsevier Ltd",

number = "1",

}

TY - JOUR

T1 - Formation of nanostructured metallic glass thin films upon sputtering

AU - Ketov, Sergey V.

AU - Joksimovic, Rastko

AU - Xie, Guoqiang

AU - Trifonov, Artem

AU - Kurihara, Kazue

AU - Louzguine-Luzgin, Dmitri V.

PY - 2017/1/1

Y1 - 2017/1/1

N2 - Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.

AB - Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.

KW - Engineering

KW - Materials science

KW - Nanotechnology

UR - https://www.scopus.com/pages/publications/85013597112

U2 - 10.1016/j.heliyon.2016.e00228

DO - 10.1016/j.heliyon.2016.e00228

M3 - 文章

AN - SCOPUS:85013597112

SN - 2405-8440

VL - 3

JO - Heliyon

JF - Heliyon

IS - 1

M1 - e00228

ER -

Formation of nanostructured metallic glass thin films upon sputtering

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this