Abstract
The transducer system is a key component of the bonding equipment in the thermosonic bonding system. Retainer ring sustains the transducer system, and the mode of mounting affects the energy delivery and the vibration modal of the transducer system directly. Finite element analysis is applied to analyze the influence of the retainer ring on the vibration modal in transducer system, the consequence shows that the retainer ring will be vibratory when it is restrained by z direction or when it is free; the principal mode in the working frequency is not consistent accord with the requirement when it is restrained by x direction; and the node position and the harmonic frequency will be affected when the mounting position of the retainer ring is changed, the experiments indicate that the node position of the transducer system is 58 mm when the retainer ring is restrained all, and it is consistent with the finite element analysis; There are many other undesirable modes that may be excited because they are very close to working frequency. Since these undesirable modes would waste ultrasonic energy and badly influence on bonding quality between gold ball and substrate, they should be well controlled in bonding.
| Original language | English |
|---|---|
| Pages (from-to) | 646-648 |
| Number of pages | 3 |
| Journal | Yadian Yu Shengguang/Piezoelectrics and Acoustooptics |
| Volume | 30 |
| Issue number | 5 |
| State | Published - Oct 2008 |
| Externally published | Yes |
Keywords
- Finite element analysis
- Retainer ring
- Transducer system
- Vibration modal
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