Finite element algorithm of static characteristics of ultraprecision hydrostatic slide

Hydrostatic slides is one of most important component in ultra-precision machine tools, which provides extremely smooth and accurate motion and positioning. Carrying capability, stiffness and angular stiffness are important performance parameters of hydrostatic slides. Traditionally, slide stiffness is calculated by engineering approximate, which is less accuracy. Besides, engineering approximation can not calculate vertical and horizontal stiffness simultaneously and is unable to predict angular stiffness, although these parameters are important for successful design of hydrostatic slides. In this paper, we propose to use finite element method to simulate performance of slides under working condition. Dimensionless Reynolds equation was processed to acquire the pressure distribution of oil film of slide, thereby the carrying capacity, stiffness and angular stiffness of hydrostatic slide. The experiments indicated that characteristics of the slide can be successfully predicted by finite element calculations.