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Fine correction of nonlinearity in homodyne interferometry

  • Physikalisch-Technische Bundesanstalt

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In a typical homodyne interferometer with 4-channel detectors, the nonlinearity resulting from beam power drifting couldn't be thoroughly suppressed by Heydemann correction. This study presents an analysis of the nonlinearity resulting from beam power drifting. From a theoretical approach, the nonlinearity model before and after conventional Heydemann correction is built. And a fine correction method involving Heydemann correction with partial data is introduced. The experimental results indicate that, the proposed method suppresses the nonlinearity in a homodyne interferometer to 0.18 nm, which would be 1.49 nm with conventional Heydemann correction.

Original languageEnglish
Title of host publicationSixth International Symposium on Precision Engineering Measurements and Instrumentation
DOIs
StatePublished - 2010
Event6th International Symposium on Precision Engineering Measurements and Instrumentation - Hangzhou, China
Duration: 8 Aug 201011 Aug 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7544
ISSN (Print)0277-786X

Conference

Conference6th International Symposium on Precision Engineering Measurements and Instrumentation
Country/TerritoryChina
CityHangzhou
Period8/08/1011/08/10

Keywords

  • Beam power drift
  • Fine correction
  • Heydemann correction
  • Homodyne interferometry
  • Nonlinearity

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