@inproceedings{ebb6ac37883d47feb88beab3471bbc13,
title = "FEM design and experiment of a micro-gripper based on piezoelectric material",
abstract = "Micro-gripper is a key module in IC/LED wire bonding. The paper presents a micro-gripper combining with piezoelectric material and flexible structure. The dynamic and static characteristics of the micro-gripper are calculated by finite element method, and the natural frequencies, the vibration modes, as well as the deflection range of the micro-gripper are obtained. In the experiment, the high-speed camera was used to track the vibration of the micro-gripper, and the relationship between deflection range and driven voltage was established. The vibration behavior was measured by a non-contact laser measuring device. These results can help improve the reliability of the micro-gripper used in wire bonding.",
keywords = "Flexible structure, Micro-gripper, Piezoelectric material, Wire bonding",
author = "Zhili Long and Lufan Zhang and Jianguo Zhang",
year = "2012",
doi = "10.4028/www.scientific.net/AMR.479-481.434",
language = "英语",
isbn = "9783037853726",
series = "Advanced Materials Research",
pages = "434--438",
booktitle = "Advanced Mechanical Design",
note = "3rd international Conference on Manufacturing Science and Engineering, ICMSE 2012 ; Conference date: 27-03-2012 Through 29-03-2012",
}