FEM analysis of stress distribution in metal/ceramic multi-layer composites prepared by EBPVD technique

The basic operating principal and the technology characteristic of Electron Beam Physical Vapor Deposition (EBPVD) technique were firstly involved in this article. The whole process preparing of metal/ceramic multi-layer composite by this technology was briefly introduced. Meantime the selection of raw material is also considered. On the basis of several assumed perfect conditions, a reasonable physical model exactly describing the deposition process was built up. Such processing factors as substrate preheating temperature were taken into accounts. Making use of the Finite Element Analysis package ANSYS, the stress field and the potential displacement changing tendency are discussed between the substrate and the first deposition layer even among metal and ceramic deposition layers adjacent to each other. The analysis results indicate that: lower preheating temperature of substrate does good effect on the cohesion property of multilayer composites and the probability of curling up after de-bonding tends to enhance as the thickness of deposition film is increased. Also it is verified that the FE model has produced little numerical error.