Fabrication of periodic metal nanowires with microscale mold by nanoimprint lithography

Shoulei Shi; Nan Lu; Yongchun Lu; Yandong Wang; Dianpeng Qi; Hongbo Xu; Lifeng Chi

doi:10.1021/am2010338

Fabrication of periodic metal nanowires with microscale mold by nanoimprint lithography

Shoulei Shi
, Nan Lu^*
, Yongchun Lu
, Yandong Wang
, Dianpeng Qi
, Hongbo Xu
, Lifeng Chi

^*Corresponding author for this work

Jilin University
University of Münster

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

In this paper, a simple method is demonstrated for fabricating periodic metal nanowires based on the unconventional nanoimprint lithography (NIL) technique. Using this method, sub-100 nm metal nanowires with the rectangular cross-section are fabricated with microscale stamp. Furthermore, the metal nanowires with different widths and heights can be generated by adjusting the imprinting parameters with the same stamp. The metal nanowires prepared with this method can be used for chemical sensing, such as ammonia sensing, and it may have applications in optical signal processing.

Original language	English
Pages (from-to)	4174-4179
Number of pages	6
Journal	ACS Applied Materials and Interfaces
Volume	3
Issue number	11
DOIs	https://doi.org/10.1021/am2010338
State	Published - 23 Nov 2011
Externally published	Yes

Keywords

P-SPEL
PMMA
gas sensor
large-scale mold
metal nanowires
nanoimprint lithography

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10.1021/am2010338

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title = "Fabrication of periodic metal nanowires with microscale mold by nanoimprint lithography",

abstract = "In this paper, a simple method is demonstrated for fabricating periodic metal nanowires based on the unconventional nanoimprint lithography (NIL) technique. Using this method, sub-100 nm metal nanowires with the rectangular cross-section are fabricated with microscale stamp. Furthermore, the metal nanowires with different widths and heights can be generated by adjusting the imprinting parameters with the same stamp. The metal nanowires prepared with this method can be used for chemical sensing, such as ammonia sensing, and it may have applications in optical signal processing.",

keywords = "P-SPEL, PMMA, gas sensor, large-scale mold, metal nanowires, nanoimprint lithography",

author = "Shoulei Shi and Nan Lu and Yongchun Lu and Yandong Wang and Dianpeng Qi and Hongbo Xu and Lifeng Chi",

year = "2011",

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doi = "10.1021/am2010338",

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T1 - Fabrication of periodic metal nanowires with microscale mold by nanoimprint lithography

AU - Shi, Shoulei

AU - Lu, Nan

AU - Lu, Yongchun

AU - Wang, Yandong

AU - Qi, Dianpeng

AU - Xu, Hongbo

AU - Chi, Lifeng

PY - 2011/11/23

Y1 - 2011/11/23

N2 - In this paper, a simple method is demonstrated for fabricating periodic metal nanowires based on the unconventional nanoimprint lithography (NIL) technique. Using this method, sub-100 nm metal nanowires with the rectangular cross-section are fabricated with microscale stamp. Furthermore, the metal nanowires with different widths and heights can be generated by adjusting the imprinting parameters with the same stamp. The metal nanowires prepared with this method can be used for chemical sensing, such as ammonia sensing, and it may have applications in optical signal processing.

AB - In this paper, a simple method is demonstrated for fabricating periodic metal nanowires based on the unconventional nanoimprint lithography (NIL) technique. Using this method, sub-100 nm metal nanowires with the rectangular cross-section are fabricated with microscale stamp. Furthermore, the metal nanowires with different widths and heights can be generated by adjusting the imprinting parameters with the same stamp. The metal nanowires prepared with this method can be used for chemical sensing, such as ammonia sensing, and it may have applications in optical signal processing.

KW - P-SPEL

KW - PMMA

KW - gas sensor

KW - large-scale mold

KW - metal nanowires

KW - nanoimprint lithography

UR - https://www.scopus.com/pages/publications/84873655269

U2 - 10.1021/am2010338

DO - 10.1021/am2010338

M3 - 文章

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AN - SCOPUS:84873655269

SN - 1944-8244

VL - 3

SP - 4174

EP - 4179

JO - ACS Applied Materials and Interfaces

JF - ACS Applied Materials and Interfaces

IS - 11

ER -

Fabrication of periodic metal nanowires with microscale mold by nanoimprint lithography

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Keywords

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