@inproceedings{c22d530d4a82423899e778a51a80e8b4,
title = "Fabrication of microcantilever arrays using sol-gel PZT thin film for nanopositioning",
abstract = "Lead zirconate titanate (PZT) piezoelectric thin films have been prepared by the sol-gel method to fabricate microcantilever arrays for nano-actuation with potential applications in hard disk drives. Film annealing temperature and time is critical to the preparation of the sol-gel thin film. The fabrication process of microcantilever arrays in planar structure is presented. Key issues for the fabrication of the cantilever are: the compatible etching process of PZT thin film, and the compensation of thin film stress in all layers to obtain a flat multiple layer structure.",
keywords = "PZT, piezoelectric thin film, silicon microcantilever, sol-gel",
author = "Hong Zhu and Min Zhou and Bangtao Chen and Jianmin Miao",
note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002 ; Conference date: 27-08-2002 Through 29-08-2002",
year = "2002",
doi = "10.1109/APMRC.2002.1037698",
language = "英语",
series = "Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002",
address = "美国",
}